发明授权
US06937406B2 Optical module and method for manufacturing optical module 失效
光模块及其制造方法

Optical module and method for manufacturing optical module
摘要:
The present invention provides an optical module and a method for manufacturing the optical module, in which a V-shaped or trapezoidal groove having a first slope and a second slope facing to the first slope is formed at the surface of a silicon substrate by anisotropic etching, an adhesive is applied to a portion of at least the second slope in a region except the first slope of the groove, and lens is fixedly put in the groove.
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