发明授权
- 专利标题: Scanning probe microscope and operation method
- 专利标题(中): 扫描探针显微镜及操作方法
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申请号: US10663302申请日: 2003-09-16
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公开(公告)号: US06941798B2公开(公告)日: 2005-09-13
- 发明人: Takehiro Yamaoka , Kazutoshi Watanabe , Kazunori Ando , Yoshiharu Shirakawabe
- 申请人: Takehiro Yamaoka , Kazutoshi Watanabe , Kazunori Ando , Yoshiharu Shirakawabe
- 申请人地址: JP Chiba
- 专利权人: SII NanoTechnology Inc.
- 当前专利权人: SII NanoTechnology Inc.
- 当前专利权人地址: JP Chiba
- 代理机构: Adams & Wilks
- 优先权: JP2002-269677 20020917; JP2003-117395 20030422
- 主分类号: G01Q10/02
- IPC分类号: G01Q10/02 ; G01Q10/06 ; G01Q60/24 ; G01Q60/50 ; G01Q90/00 ; G01N13/10 ; G01B5/28 ; G01N13/16 ; G12B21/24
摘要:
A scanning probe is microscope has a cantilever having a probe at a disal end thereof and an oscillator for generating a resonance signal near a resonance of the cantilever. A vibrating device receives the resonance signal as a driving signal for vibrating the cantilever. A variable gain amplifier adjusts a gain of displacement signal corresponding to displacement of the vibrating cantilever so as to satisfy the equation G=(A/A0)*G0 to control a quality factor value of the cantilever resonance to an optimal quality factor value, where G represents a gain value of the variable gain amplifer, A represents a preselected oscillation amplitude of the oscillator, A0 represents an initial oscillation amplitude of the oscillator, and G0 represents a gain value of the variable gain amplifier when the initial oscillation amplitude of the oscillator is A0.
公开/授权文献
- US20040093935A1 Scanning probe microscope and operation method 公开/授权日:2004-05-20