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公开(公告)号：US20060043286A1
公开(公告)日：2006-03-02
申请号：US11068479
申请日：2005-10-28
申请人： James Massie
发明人： James Massie
摘要： A balanced momentum probe holder in an apparatus for characterizing a sample surface has first and second members each having extensible and retractable distal ends. The distal ends extend or retract substantially simultaneously in response to a signal from a detector thus balancing the momentums of the first and second members and reducing the net momentum of the probe holder to essentially zero. Balancing the momentum of the probe holder reduces parasitic oscillations in the apparatus thus enhancing performance.
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公开(公告)号：US07569817B2
公开(公告)日：2009-08-04
申请号：US11612104
申请日：2006-12-18
申请人： Takao Kusaka , Nobuki Yoshimatsu , Susumu Yasuda , Junichi Seki
发明人： Takao Kusaka , Nobuki Yoshimatsu , Susumu Yasuda , Junichi Seki
CPC分类号： G01Q70/04 , G01Q10/04 , Y10S977/849 , Y10S977/85 , Y10S977/851
摘要： In a scanning probe apparatus capable of always effectively canceling an inertial force to suppress vibration even in repetitive use while replacing a sample holding table or a probe, a stage for a sample or the probe includes a drive element for moving the sample holding table and movable portions movable in a direction in which an inertial force generated during movement of the sample holding table. The stage is configured so that the drive element, the movable portions, and the sample holding table or the probe are integrally detachably mountable to a main assembly of the scanning probe apparatus.
摘要翻译： 在替代样品保持台或探针的同时能够始终有效地抵消惯性力以抑制振动的扫描探针装置中，用于样品或探针的载物台包括用于移动样品保持台并可移动的驱动元件 可在样品保持台移动期间产生的惯性力的方向移动的部分。 台架构造为使得驱动元件，可移动部分和样品保持台或探针可整体地可拆卸地安装在扫描探针装置的主组件上。
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3.发明授权Quantum beam aided atomic force microscopy and quantum beam aided atomic force microscope 失效量子束辅助原子力显微镜和量子束辅助原子力显微镜公开(公告)号：US07534999B2
公开(公告)日：2009-05-19
申请号：US11587031
申请日：2004-12-21
摘要： A quantum beam aided atomic force microscopy and quantum beam aided atomic force microscope that can simultaneously perform atomic-level configuration observation and elemental analysis with the use of an atomic force microscope and further can effect analysis of the chemical state of sample surface and that as being operable in liquids, can realize the elemental analysis and chemical state analysis of biosamples with an atomic-level resolving power. Accordingly, atoms of sample surface are irradiated with quantum beams, such as charged particles, electrons and photons, having a given electron transition energy characteristic of element, and any change in interaction force between the atoms of sample surface having been irradiated with quantum beams and the distal end of the probe is detected.
摘要翻译： 量子束辅助原子力显微镜和量子束辅助原子力显微镜，可以同时使用原子力显微镜进行原子级配置观察和元素分析，进一步可以对样品表面的化学状态进行分析， 可以在液体中操作，可以实现具有原子级分辨能力的生物样品的元素分析和化学状态分析。 因此，样品表面的原子被量子束照射，例如具有给定的元素的电子跃迁能量特性的带电粒子，电子和光子，并且已经用量子束照射样品表面的原子之间的相互作用力的任何变化，以及 检测探头的远端。
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公开(公告)号：US07631547B2
公开(公告)日：2009-12-15
申请号：US11612111
申请日：2006-12-18
申请人： Nobuki Yoshimatsu , Takao Kusaka , Susumu Yasuda , Junichi Seki
发明人： Nobuki Yoshimatsu , Takao Kusaka , Susumu Yasuda , Junichi Seki
摘要： A scanning probe apparatus for obtaining information of a sample or processing the sample with relative movement between the sample and the apparatus includes a sample stage for holding the sample, and a drive stage with a probe, a cantilever supporting the probe, a cantilever holding member for holding the cantilever, and a drive element for driving the probe in three directions perpendicular to each other. In addition, a movable portion surrounds the drive element and is positioned outside of the drive element, with the movable portion movable in a direction in which an inertial force generated during movement of the probe is canceled. The drive stage includes an optical path, through which light passes, provided inside of the drive stage.
摘要翻译： 用于获取样品信息或在样品与设备之间相对移动的样品处理的扫描探针装置包括用于保持样品的样品台和具有探针的驱动台，支撑探针的悬臂，悬臂保持构件 用于保持悬臂，以及用于在垂直于彼此的三个方向上驱动探针的驱动元件。 此外，可动部分围绕驱动元件并且位于驱动元件的外侧，其中可移动部分可以在探测器移动期间产生的惯性力被消除的方向上移动。 驱动级包括设置在驱动级内部的光通过的光路。
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公开(公告)号：US07506455B2
公开(公告)日：2009-03-24
申请号：US10576026
申请日：2004-10-21
CPC分类号： G01Q70/04
摘要： A metrology instrument, such as a probe, probe head, stylus or stylus arm, for mounting on a coordinate position apparatus. The metrology instrument is at least partially constructed from at least one sheet of thermally stable metallic material which is folded to form a three dimensional structure. The at least one sheet of thermally stable material is utilized in the metrology loop of the metrology instrument.
摘要翻译： 用于安装在坐标位置装置上的测量仪器，例如探针，探头，触针或触针臂。 测量仪器至少部分地由至少一片热稳定的金属材料构成，其被折叠以形成三维结构。 至少一片热稳定材料被用于计量仪器的计量回路中。
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公开(公告)号：US20070214864A1
公开(公告)日：2007-09-20
申请号：US11678018
申请日：2007-02-22
申请人： Roger Proksch
发明人： Roger Proksch
CPC分类号： F16F7/1011 , G01L5/0038 , G01L5/0061 , G01Q10/065 , G01Q70/04
摘要： A technique for actively damping internal vibrations in a scanning probe microscope is disclosed. The excitation of various mechanical movements, including resonances, in the mechanical assembly of an SPM can adversely effect its performance, especially for high speed applications. An actuator is used to compensate for the movements. The actuator may operate in only the z direction, or may operate in other directions. The actuator(s) may be located at positions of antinodes.
摘要翻译： 公开了一种用于在扫描探针显微镜中主动地阻尼内部振动的技术。 在SPM的机械组装中的各种机械运动（包括谐振）的激发可能不利地影响其性能，特别是对于高速应用。 执行器用于补偿运动。 致动器可以仅在z方向上操作，或者可以在其它方向上操作。 致动器可以位于波腹的位置。
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公开(公告)号：US20070144243A1
公开(公告)日：2007-06-28
申请号：US11612111
申请日：2006-12-18
申请人： Nobuki YOSHIMATSU , Takao Kusaka , Susumu YASUDA , Junichi Seki
发明人： Nobuki YOSHIMATSU , Takao Kusaka , Susumu YASUDA , Junichi Seki
摘要： A drive stage, for driving a sample or a probe, capable of ensuring a movable range of a movable portion as a counterweight and always effectively canceling an inertial force to suppress vibration of a supporting member leading to vibration of the sample or the probe includes a counter drive element for moving the probe or a sample holding table and a movable portion movable in a direction in which the inertial force generated during movement of the probe or the sample holding table. The movable portion surrounds the counter drive element outside the counter drive element.
摘要翻译： 用于驱动样本或探针的驱动台能够确保可移动部分作为配重的可移动范围并且总是有效地抵消惯性力以抑制导致样品或探针的振动的支撑构件的振动，包括： 用于移动探针或样品保持台的可逆驱动元件和可在探头或样品保持台移动期间产生的惯性力的方向上移动的可动部分。 可动部分围绕计数器驱动元件围绕计数器驱动元件。
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公开(公告)号：US06941798B2
公开(公告)日：2005-09-13
申请号：US10663302
申请日：2003-09-16
IPC分类号： G01Q10/02 , G01Q10/06 , G01Q60/24 , G01Q60/50 , G01Q90/00 , G01N13/10 , G01B5/28 , G01N13/16 , G12B21/24
CPC分类号： G01Q70/04 , G01Q10/065 , Y10S977/85
摘要： A scanning probe is microscope has a cantilever having a probe at a disal end thereof and an oscillator for generating a resonance signal near a resonance of the cantilever. A vibrating device receives the resonance signal as a driving signal for vibrating the cantilever. A variable gain amplifier adjusts a gain of displacement signal corresponding to displacement of the vibrating cantilever so as to satisfy the equation G=(A/A0)*G0 to control a quality factor value of the cantilever resonance to an optimal quality factor value, where G represents a gain value of the variable gain amplifer, A represents a preselected oscillation amplitude of the oscillator, A0 represents an initial oscillation amplitude of the oscillator, and G0 represents a gain value of the variable gain amplifier when the initial oscillation amplitude of the oscillator is A0.
摘要翻译： 扫描探针是显微镜，具有在其末端具有探针的悬臂和用于在悬臂共振附近产生共振信号的振荡器。 振动装置接收谐振信号作为振动悬臂的驱动信号。 可变增益放大器调整与振动悬臂的位移相对应的位移信号的增益，以满足等式G =（A / A 0 ）* G 0 < 悬臂共振的质量因子值到最优质量因子值，其中G表示可变增益放大器的增益值，A表示振荡器的预选振荡幅度，A <0>表示初始振荡 当振荡器的初始振荡幅度为A <0> 0时，振荡器的振幅和G 0 <0>表示可变增益放大器的增益值。
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