Invention Grant
US06942222B2 Seal for sealing and load bearing a process tube in a vacuum system
失效
在真空系统中密封和承载工艺管的密封
- Patent Title: Seal for sealing and load bearing a process tube in a vacuum system
- Patent Title (中): 在真空系统中密封和承载工艺管的密封
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Application No.: US10450814Application Date: 2001-12-19
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Publication No.: US06942222B2Publication Date: 2005-09-13
- Inventor: Steven T. Fink
- Applicant: Steven T. Fink
- Applicant Address: JP Tokyo
- Assignee: Tokyo Electron Limited
- Current Assignee: Tokyo Electron Limited
- Current Assignee Address: JP Tokyo
- Agency: Oblon, Spivak, McClelland, Maier & Neustadt, P.C.
- International Application: PCT/US01/45860 WO 20011219
- International Announcement: WO02/50463 WO 20020627
- Main IPC: F16J15/00
- IPC: F16J15/00 ; F16L17/06 ; F16L23/16 ; F16L39/00
Abstract:
A seal for sealing and load bearing a process tube in a vacuum system including a seal member and a load bearing spacer provided in a seal cavity. The seal generally includes a seal cavity provided in a housing, where the seal cavity is configured opposite the process tube. At least one load bearing spacer is received within the seal cavity and adapted to contact the process tube is mounted to the housing. Additionally, at least one seal member is received within the seal cavity and adapted to contact the process tube.
Public/Granted literature
- US20040080120A1 Seal for sealing and load bearing a process tube in a vacuum system Public/Granted day:2004-04-29
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