发明授权
- 专利标题: Semiconductor device on silicon-on-insulator and method for manufacturing the semiconductor device
- 专利标题(中): 绝缘体上的半导体器件及半导体器件的制造方法
-
申请号: US10636415申请日: 2003-08-07
-
公开(公告)号: US06943084B2公开(公告)日: 2005-09-13
- 发明人: Young-ki Lee , Heon-jong Shin , Ji-woon Rim
- 申请人: Young-ki Lee , Heon-jong Shin , Ji-woon Rim
- 申请人地址: KR
- 专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人地址: KR
- 代理机构: Mills & Onello LLP
- 优先权: KR2001-55467 20010910
- 主分类号: H01L27/12
- IPC分类号: H01L27/12 ; H01L21/336 ; H01L21/84 ; H01L29/78 ; H01L29/786 ; H01L21/00
摘要:
A semiconductor device on a SOI and a method for manufacturing the same are provided. The semiconductor device includes a semiconductor wafer having a SOI structure including an insulating layer having a predetermined thickness and a monocrystalline silicon layer formed on the insulating layer, an isolation insulating layer formed on the insulating layer on the semiconductor wafer, a gate comprised of a gate dielectric layer and a gate conductive layer, which are sequentially stacked on the monocrystalline silicon layer, insulating layer spacers formed at the sidewalls of the gate, and a source junction and a drain junction asymmetrically formed at either side of the gate between the isolation insulating layer spacers and the insulating layer. In the semiconductor device formed on a SOI, source and drain junctions are formed at either side of a gate to be asymmetrical, and thus a ground of a transistor is formed on the SOI, and thus the electrical characteristics of the semiconductor device are improved.
公开/授权文献
信息查询
IPC分类: