发明授权
US06943390B2 High-gain photodetector with separated PN junction and rare earth doped region and a method of forming the same
有权
具有分离的PN结和稀土掺杂区的高增益光电探测器及其形成方法
- 专利标题: High-gain photodetector with separated PN junction and rare earth doped region and a method of forming the same
- 专利标题(中): 具有分离的PN结和稀土掺杂区的高增益光电探测器及其形成方法
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申请号: US10142264申请日: 2002-05-08
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公开(公告)号: US06943390B2公开(公告)日: 2005-09-13
- 发明人: Salvatore Coffa , Sebania Libertino , Ferruccio Frisina
- 申请人: Salvatore Coffa , Sebania Libertino , Ferruccio Frisina
- 申请人地址: IT Agrate Brianza
- 专利权人: STMicroelectronics S.r.l.
- 当前专利权人: STMicroelectronics S.r.l.
- 当前专利权人地址: IT Agrate Brianza
- 代理机构: Seed IP Law Group PLLC
- 代理商 Lisa K. Jorgensen; Timothy L. Boller
- 优先权: EP01830308 20010515
- 主分类号: H01L31/0288
- IPC分类号: H01L31/0288 ; H01L31/107 ; H01L27/148
摘要:
The high-gain photodetector is formed in a semiconductor-material body which houses a PN junction and a sensitive region that is doped with rare earths, for example erbium. The PN junction forms an acceleration and gain region separate from the sensitive region. The PN junction is reverse-biased and generates an extensive depletion region accommodating the sensitive region. Thereby, the incident photon having a frequency equal to the absorption frequency of the used rare earth crosses the PN junction, which is transparent to light, can be captured by an erbium ion in the sensitive region, so as to generate a primary electron, which is accelerated towards the PN junction by the electric field present, and can, in turn, generate secondary electrons by impact, according to an avalanche process. Thereby, a single photon can give rise to a cascade of electrons, thus considerably increasing detection efficiency.
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