发明授权
- 专利标题： Fabrication of silicon micro mechanical structures
- 专利标题（中）： 硅微机械结构的制造
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申请号： US10466516申请日： 2002-01-11
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公开(公告)号： US06949397B2公开(公告)日： 2005-09-27
- 发明人: Michel Despont , Roy H. Magnuson , Ute Drechsler
- 申请人： Michel Despont , Roy H. Magnuson , Ute Drechsler
- 申请人地址： US NY Armonk
- 专利权人： International Business Machines Corporation
- 当前专利权人： International Business Machines Corporation
- 当前专利权人地址： US NY Armonk
- 代理商 Wan Yee Cheung
- 优先权： EP01810046 20010118
- 国际申请： PCT/IB02/00154 WO 20020111
- 国际公布： WO02/05717 WO 20020725
- 主分类号： B81B3/00
- IPC分类号： B81B3/00 ; B81C1/00 ; C23F13/14 ; H01L21/306 ; H01L21/00
摘要：
A method for protecting a material of a microstructure comprising said material and a noble metal layer against undesired galvanic etching during manufacture comprises forming on the structure a sacrificial metal layer having a lower redox potential than said material, the sacrificial metal layer being electrically connected to said noble metal layer.
公开/授权文献
- US20040135219A1 Fabrication of silicon micro mechanical structures 公开/授权日：2004-07-15
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