Invention Grant
US06950355B2 System and method to screen defect related reliability failures in CMOS SRAMS
失效
系统和方法来筛选CMOS SRAMS中的缺陷相关可靠性故障
- Patent Title: System and method to screen defect related reliability failures in CMOS SRAMS
- Patent Title (中): 系统和方法来筛选CMOS SRAMS中的缺陷相关可靠性故障
-
Application No.: US10020208Application Date: 2001-12-18
-
Publication No.: US06950355B2Publication Date: 2005-09-27
- Inventor: Surya Battacharya , Ming Chen , Guang-Jye Shiau , Liming Tsau , Henry Chen
- Applicant: Surya Battacharya , Ming Chen , Guang-Jye Shiau , Liming Tsau , Henry Chen
- Applicant Address: US CA Irvine
- Assignee: Broadcom Corporation
- Current Assignee: Broadcom Corporation
- Current Assignee Address: US CA Irvine
- Agency: Sterne, Kessler, Goldstein & Fox, p.l.l.c.
- Main IPC: G01R31/02
- IPC: G01R31/02 ; G01R31/28 ; G11C29/00 ; G11C29/02 ; G11C7/00

Abstract:
A method for testing a semiconductor wafer. An array of probes is coupled to the semiconductor wafer. Then a voltage difference is applied across a plurality of adjacent metal line pairs (e.g., wordline and/or bitline pairs) of one or more SRAM arrays of at least one die. Application of the voltage difference induces failure of metal stringers or defects between the adjacent lines. Additionally, the voltage can be applied across respective pairs of substantially all parallel metal lines of the one or more SRAM arrays of more that one die of the semiconductor wafer.
Public/Granted literature
- US20030036231A1 System and method to screen defect related reliability failures in CMOS SRAMS Public/Granted day:2003-02-20
Information query