发明授权
- 专利标题: Method of manufacturing a surface acoustic wave element
- 专利标题(中): 声表面波元件的制造方法
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申请号: US10629633申请日: 2003-07-30
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公开(公告)号: US06951047B2公开(公告)日: 2005-10-04
- 发明人: Muneko Tomioka , Kiyoharu Yamashita , Mitsuhiro Furukawa
- 申请人: Muneko Tomioka , Kiyoharu Yamashita , Mitsuhiro Furukawa
- 申请人地址: JP Osaka
- 专利权人: Matsushita Electric Industrial Co., Ltd.
- 当前专利权人: Matsushita Electric Industrial Co., Ltd.
- 当前专利权人地址: JP Osaka
- 代理机构: Wenderoth, Lind & Ponack, L.L.P.
- 优先权: JP2002-222792 20020731
- 主分类号: H03H3/08
- IPC分类号: H03H3/08 ; H03H9/02 ; H03H9/145 ; H03H9/25 ; H04R17/00 ; H01L41/04 ; H01L41/08 ; H01L41/18 ; H02N2/00
摘要:
A SAW element of the present invention includes a plurality of inter-digital transducer (IDT) electrodes on a piezoelectric substrate, grating reflector electrodes disposed on the sides of the IDT electrodes, and a plurality of pad electrodes led from the IDT electrodes and the grating reflector electrodes. A plurality of the pad electrodes includes isolated pad electrodes not directly opposed to the outer periphery of the SAW element, and adjacent pad electrodes directly opposed to the outer periphery thereof A connecting electrode between the isolated pad electrode and the adjacent pad electrode is removed by etching at least before dicing in order to prevent discharge from occurring due to pyroelectricity, and to prevent the electrodes from being damaged.
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