公开(公告)号：US20050035830A1

公开(公告)日：2005-02-17

申请号：US10629633

申请日：2003-07-30

申请人： Muneko Tomioka ,  Kiyoharu Yamashita ,  Mitsuhiro Furukawa

发明人： Muneko Tomioka ,  Kiyoharu Yamashita ,  Mitsuhiro Furukawa

IPC分类号： H03H3/08 ,  H03H9/02 ,  H03H9/145 ,  H03H9/25 ,  H03H9/64

CPC分类号： H03H9/02992 ,  H03H3/08 ,  H03H9/02921 ,  Y10T29/42 ,  Y10T29/49005 ,  Y10T29/49007 ,  Y10T29/49128 ,  Y10T29/49144 ,  Y10T29/49156 ,  Y10T29/49794 ,  Y10T29/49798

摘要： A SAW element of the present invention includes a plurality of inter-digital transducer (IDT) electrodes on a piezoelectric substrate, grating reflector electrodes disposed on the sides of the IDT electrodes, and a plurality of pad electrodes led from the IDT electrodes and the grating reflector electrodes. A plurality of the pad electrodes includes isolated pad electrodes not directly opposed to the outer periphery of the SAW element, and adjacent pad electrodes directly opposed to the outer periphery thereof A connecting electrode between the isolated pad electrode and the adjacent pad electrode is removed by etching at least before dicing in order to prevent discharge from occurring due to pyroelectricity, and to prevent the electrodes from being damaged.

摘要翻译： 本发明的SAW元件包括在压电基板上的多个数字间换能器（IDT）电极，设置在IDT电极的侧面的光栅反射器电极和从IDT电极和光栅引出的多个焊盘电极 反射器电极。 多个焊盘电极包括不直接与SAW元件的外周直接相对的隔离焊盘电极和与其外周直接相对的相邻焊盘电极。隔离焊盘电极和相邻焊盘电极之间的连接电极通过蚀刻去除 至少在切割之前为了防止由于热电从而发生放电，并且防止电极被损坏。

公开(公告)号：US06951047B2

公开(公告)日：2005-10-04

申请号：US10629633

申请日：2003-07-30

申请人： Muneko Tomioka ,  Kiyoharu Yamashita ,  Mitsuhiro Furukawa

发明人： Muneko Tomioka ,  Kiyoharu Yamashita ,  Mitsuhiro Furukawa

IPC分类号： H03H3/08 ,  H03H9/02 ,  H03H9/145 ,  H03H9/25 ,  H04R17/00 ,  H01L41/04 ,  H01L41/08 ,  H01L41/18 ,  H02N2/00

CPC分类号： H03H9/02992 ,  H03H3/08 ,  H03H9/02921 ,  Y10T29/42 ,  Y10T29/49005 ,  Y10T29/49007 ,  Y10T29/49128 ,  Y10T29/49144 ,  Y10T29/49156 ,  Y10T29/49794 ,  Y10T29/49798

摘要： A SAW element of the present invention includes a plurality of inter-digital transducer (IDT) electrodes on a piezoelectric substrate, grating reflector electrodes disposed on the sides of the IDT electrodes, and a plurality of pad electrodes led from the IDT electrodes and the grating reflector electrodes. A plurality of the pad electrodes includes isolated pad electrodes not directly opposed to the outer periphery of the SAW element, and adjacent pad electrodes directly opposed to the outer periphery thereof A connecting electrode between the isolated pad electrode and the adjacent pad electrode is removed by etching at least before dicing in order to prevent discharge from occurring due to pyroelectricity, and to prevent the electrodes from being damaged.

摘要翻译： 本发明的SAW元件包括在压电基板上的多个数字间换能器（IDT）电极，设置在IDT电极的侧面的光栅反射器电极和从IDT电极和光栅引出的多个焊盘电极 反射器电极。 多个焊盘电极包括不直接与SAW元件的外周直接相对的隔离焊盘电极和与其外周直接相对的相邻焊盘电极。隔离焊盘电极和相邻焊盘电极之间的连接电极通过蚀刻去除 至少在切割之前为了防止由于热电从而发生放电，并且防止电极被损坏。