Transistor structure and method of fabrication

Invention Grant

US06952040B2 Transistor structure and method of fabrication 失效

Title translation: 晶体管结构及其制造方法

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Patent Title: Transistor structure and method of fabrication
Patent Title (中): 晶体管结构及其制造方法
Application No.: US09895697

Application Date: 2001-06-29
Publication No.: US06952040B2

Publication Date: 2005-10-04
Inventor: Robert S. Chau , Jack Kavalieros , Anand Murthy , Brian Roberds , Brian S. Doyle
Applicant: Robert S. Chau , Jack Kavalieros , Anand Murthy , Brian Roberds , Brian S. Doyle
Applicant Address: US CA Santa Clara
Assignee: Intel Corporation
Current Assignee: Intel Corporation
Current Assignee Address: US CA Santa Clara
Agency: Blakely, Sokoloff, Taylor & Zafman LLP
Main IPC: H01L21/3205
IPC: H01L21/3205 ; H01L21/336 ; H01L29/49 ; H01L29/76 ; H01L29/786 ; H01L29/94 ; H01L31/062 ; H01L31/113

Transistor structure and method of fabrication

Abstract:

A novel transistor structure and its method of fabrication. According to the present invention, the transistor includes an intrinsic silicon body having a first surface. A gate dielectric is formed on the first surface of the intrinsic silicon body. A gate electrode is formed on the gate dielectric wherein the gate electrode comprises a mid-gap work function film on the gate dielectric. A pair of source/drain regions are formed on opposite sides of the intrinsic silicon body.

Abstract(Chinese):

一种新颖的晶体管结构及其制造方法。根据本发明，晶体管包括具有第一表面的本征硅体。在本征硅体的第一表面上形成栅极电介质。栅极电极形成在栅极电介质上，其中栅电极在栅极电介质上包括中间间隙功函数膜。一对源极/漏极区域形成在本征硅体的相对侧上。

Public/Granted literature

US20030001219A1 Novel transistor structure and method of fabrication Public/Granted day:2003-01-02

Information query

Espacenet

IPC分类:

H	电学
H01	基本电气元件
H01L	半导体器件；其他类目中不包括的电固体器件（使用半导体器件的测量入G01；一般电阻器入H01C；磁体、电感器、变压器入H01F；一般电容器入H01G；电解型器件入H01G9/00；电池组、蓄电池入H01M；波导管、谐振器或波导型线路入H01P；线路连接器、汇流器入H01R；受激发射器件入H01S；机电谐振器入H03H；扬声器、送话器、留声机拾音器或类似的声机电传感器入H04R；一般电光源入H05B；印刷电路、混合电路、电设备的外壳或结构零部件、电气元件的组件的制造入H05K；在具有特殊应用的电路中使用的半导体器件见应用相关的小类）
H01L21/00	专门适用于制造或处理半导体或固体器件或其部件的方法或设备
H01L21/02	.半导体器件或其部件的制造或处理
H01L21/04	..至少具有一个跃变势垒或表面势垒的器件，例如PN结、耗尽层、载体集结层
H01L21/18	...器件有由周期表Ⅳ族元素或含有/不含有杂质的AⅢBⅤ族化合物构成的半导体，如掺杂材料
H01L21/30	....用H01L21/20至H01L21/26各组不包含的方法或设备处理半导体材料的（在半导体材料上制作电极的入H01L21/28）
H01L21/31	.....在半导体材料上形成绝缘层的，例如用于掩膜的或应用光刻技术的（密封层入H01L21/56）；以及这些层的后处理；这些层的材料的选择
H01L21/3205	......非绝缘层的沉积，例如绝缘层上的导电层或电阻层；这些层的后处理（电极的制造入H01L21/28）