发明授权
- 专利标题： Wafer cassette, and liquid phase growth system and liquid-phase growth process which make use of the same
- 专利标题（中）： 晶圆盒，液相生长系统和液相生长工艺，使用它们
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申请号： US09978633申请日： 2001-10-18
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公开(公告)号： US06953506B2公开(公告)日： 2005-10-11
- 发明人: Masaaki Iwane , Tetsuro Saito , Tatsumi Shoji , Makoto Iwakami , Takehito Yoshino , Shoji Nishida , Noritaka Ukiyo , Masaki Mizutani
- 申请人： Masaaki Iwane , Tetsuro Saito , Tatsumi Shoji , Makoto Iwakami , Takehito Yoshino , Shoji Nishida , Noritaka Ukiyo , Masaki Mizutani
- 申请人地址： JP Tokyo
- 专利权人： Canon Kabushiki Kaisha
- 当前专利权人： Canon Kabushiki Kaisha
- 当前专利权人地址： JP Tokyo
- 代理机构： Fitzpatrick, Cella, Harper and Scinto
- 优先权： JP2000-330900 20001030
- 主分类号： C30B19/06
- IPC分类号： C30B19/06 ; H01L21/00 ; H01L21/673 ; H01L21/8242
摘要：
A wafer cassette comprises a holding member having a depression corresponding to the shape of the substrate, and a cover having an opening smaller than the surface size of the substrate. The substrate is to be held in the depression by means of the holding member and the cover, and the substrate is to be covered at its one-side surface, side and all peripheral region of the other-side surface, with the holding member at its depression and with the cover at the edge of its opening. Also disclosed are a liquid-phase growth system and a liquid-phase growth process which make use of the wafer cassette.