- 专利标题: Conductive transparent probe and probe control apparatus
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申请号: US10228139申请日: 2002-08-27
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公开(公告)号: US06953930B2公开(公告)日: 2005-10-11
- 发明人: Toru Murashita
- 申请人: Toru Murashita
- 申请人地址: JP Tokyo
- 专利权人: Nippon Telegraph and Telephone Corporation
- 当前专利权人: Nippon Telegraph and Telephone Corporation
- 当前专利权人地址: JP Tokyo
- 代理机构: Oblon, Spivak, McClelland, Maier & Neustadt, P.C.
- 优先权: JP2001-256206 20010827; JP2001-341651 20011107
- 主分类号: G01Q60/20
- IPC分类号: G01Q60/20 ; G01Q70/00 ; G01Q70/10 ; G01Q70/14 ; G21K7/00 ; G01N13/16 ; G01B5/28
摘要:
A conductive transparent probe used in a probe control apparatus for adjusting a distance between the apex of the probe and a sample by vibrating the probe with an vibrator in a direction perpendicular to the axis of the probe is provided. The conductive transparent probe includes: an optical fiber having a taper part at one end; a conductive transparent film formed on the surface of the taper part; a first metal film formed on the surface of the optical fiber other than the taper part; wherein the conductive transparent film and the first metal film are electrically connected, and length and thickness of the first metal film are determined such that the conductive transparent probe vibrates while contacting with the vibrator.
公开/授权文献
- US20030037605A1 Conductive transparent probe and probe control apparatus 公开/授权日:2003-02-27
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