发明授权
US06958808B2 System and method for resetting a reaction mass assembly of a stage assembly
失效
用于复位舞台组件的反作用质量组件的系统和方法
- 专利标题: System and method for resetting a reaction mass assembly of a stage assembly
- 专利标题(中): 用于复位舞台组件的反作用质量组件的系统和方法
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申请号: US10458384申请日: 2003-06-11
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公开(公告)号: US06958808B2公开(公告)日: 2005-10-25
- 发明人: Keiichi Tanaka , Mike Binnard , Andrew J. Hazelton
- 申请人: Keiichi Tanaka , Mike Binnard , Andrew J. Hazelton
- 申请人地址: JP Tokyo
- 专利权人: Nikon Corporation
- 当前专利权人: Nikon Corporation
- 当前专利权人地址: JP Tokyo
- 代理机构: Oliff & Berridge PLC
- 主分类号: G03B27/62
- IPC分类号: G03B27/62 ; G03F7/20 ; G03B27/42 ; G03B27/58
摘要:
A stage assembly for moving and positioning a device is provided herein. The stage assembly includes a stage base, a stage, a stage mover assembly, a reaction mass assembly, a reaction mover assembly, and a control system. The stage mover assembly moves the stage relative to the stage base. The reaction mass assembly reduces the reaction forces created by the stage mover assembly that are transferred to the stage base. The reaction mover assembly adjusts the position of the reaction mass assembly relative to the stage base. Uniquely, the control system controls and directs current to the reaction mover assembly in a way that minimizes the influence of disturbances created by the reaction mover assembly on the stage assembly. More specifically, the timing and/or the amount of current from the control system directed to the reaction mover assembly is varied to minimize the influence of the disturbances created by the reaction mover assembly on the stage assembly. With this design, the reaction mover assembly has less influence upon the position of the stage base. This allows for more accurate positioning of the device by the stage assembly and better performance of the stage assembly.
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