发明授权
- 专利标题： Heating resistor film, recording head substrate, recording head, and recording apparatus
- 专利标题（中）： 加热电阻膜，记录头基板，记录头和记录装置
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申请号： US10270527申请日： 2002-10-16
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公开(公告)号： US06964471B2公开(公告)日： 2005-11-15
- 发明人: Seiichi Tamura , Genzo Momma , Yukihiro Hayakawa , Yoshinori Kawasaki
- 申请人： Seiichi Tamura , Genzo Momma , Yukihiro Hayakawa , Yoshinori Kawasaki
- 申请人地址： JP Tokyo
- 专利权人： Canon Kabushiki Kaisha
- 当前专利权人： Canon Kabushiki Kaisha
- 当前专利权人地址： JP Tokyo
- 代理机构： Fitzpatrick, Cella, Harper & Scinto
- 优先权： JP2001-323431 20011022
- 主分类号： B41J2/05
- IPC分类号： B41J2/05 ; B41J2/14 ; H01C7/00
摘要：
To provide a heating resistor film having a sufficiently high durability to repetitive pulse applications, a recording head substrate including the heating resistor film, a recording head, and a recording apparatus. A heating resistor film that generates heat energy using currents flowing from a wire in a heat acting portion of a recording head substrate, is made of amorphous tantalum silicon nitride having a sheet resistance of 200 Ω/□ to 400 Ω/□, and has a thickness of 30 nm to 80 nm.
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