发明授权
- 专利标题: Method of producing a piezoelectric/electrostrictive device
- 专利标题(中): 制造压电/电致伸缩器件的方法
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申请号: US10122658申请日: 2002-04-15
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公开(公告)号: US06968603B2公开(公告)日: 2005-11-29
- 发明人: Yukihisa Takeuchi , Tsutomu Nanataki , Koji Kimura
- 申请人: Yukihisa Takeuchi , Tsutomu Nanataki , Koji Kimura
- 申请人地址: JP Nagoya
- 专利权人: NGK Insulators, Ltd.
- 当前专利权人: NGK Insulators, Ltd.
- 当前专利权人地址: JP Nagoya
- 代理机构: Burr & Brown
- 优先权: JP11-281522 19991001; JP11-307844 19991028; JP11-326195 19991116; JP11-371967 19991227; JP2000-013576 20000121; JP2000-015123 20000124; JP2000-056434 20000301; JP2000-238241 20000807
- 主分类号: H01L41/08
- IPC分类号: H01L41/08 ; H01L41/083 ; H01L41/09 ; H01L41/22 ; H01L41/338 ; H02N2/00 ; H04R17/00 ; H01L41/04 ; H01L41/18
摘要:
A piezoelectric/electrostrictive device includes a pair of mutually opposing thin plate sections, a movable section, and a fixing section for supporting the thin plate sections and the movable section. Piezoelectric/electrostrictive elements are arranged on at least one thin plate section of the pair of thin plate sections. A hole is formed by both inner walls of the pair of thin plate sections, an inner wall of the movable section, and an inner wall of the fixing section. The piezoelectric/electrostrictive device further includes at least one beam section extending from the inner wall of the movable section to the inner wall of the fixing section.