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US06980412B2 Variable tunable range MEMS capacitor 失效
可变可调范围的MEMS电容器

Variable tunable range MEMS capacitor
Abstract:
The invention relates to a variable capacitor and method of making it. The variable capacitor comprises a fixed charge plate disposed in a substrate, a movable charge plate disposed above the fixed charge plate, and a stiffener affixed to the movable charge plate. The movable charge plate may be patterned to form a movable actuator plate where the fixed charge plate is elevated above a fixed actuator plate.
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