Invention Grant
- Patent Title: Variable tunable range MEMS capacitor
- Patent Title (中): 可变可调范围的MEMS电容器
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Application No.: US09992796Application Date: 2001-11-05
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Publication No.: US06980412B2Publication Date: 2005-12-27
- Inventor: Peng Cheng , Qing Ma
- Applicant: Peng Cheng , Qing Ma
- Applicant Address: US CA Santa Clara
- Assignee: Intel Corporation
- Current Assignee: Intel Corporation
- Current Assignee Address: US CA Santa Clara
- Agent Kathy J. Ortiz
- Main IPC: H01G5/16
- IPC: H01G5/16 ; H01G5/00 ; H01G7/00

Abstract:
The invention relates to a variable capacitor and method of making it. The variable capacitor comprises a fixed charge plate disposed in a substrate, a movable charge plate disposed above the fixed charge plate, and a stiffener affixed to the movable charge plate. The movable charge plate may be patterned to form a movable actuator plate where the fixed charge plate is elevated above a fixed actuator plate.
Public/Granted literature
- US20020074621A1 Variable tunable range mems capacitor Public/Granted day:2002-06-20
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