发明授权
US06984871B2 Semiconductor device with high structural reliability and low parasitic capacitance
失效
具有高结构可靠性和低寄生电容的半导体器件
- 专利标题: Semiconductor device with high structural reliability and low parasitic capacitance
- 专利标题(中): 具有高结构可靠性和低寄生电容的半导体器件
-
申请号: US10441096申请日: 2003-05-20
-
公开(公告)号: US06984871B2公开(公告)日: 2006-01-10
- 发明人: Tomonori Tanoue , Kazuhiro Mochizuki , Hiroji Yamada
- 申请人: Tomonori Tanoue , Kazuhiro Mochizuki , Hiroji Yamada
- 申请人地址: JP Tokyo
- 专利权人: Renesas Technology Corporation
- 当前专利权人: Renesas Technology Corporation
- 当前专利权人地址: JP Tokyo
- 代理机构: Reed Smith LLP
- 代理商 Stanley P. Fisher, Esq.; Juan Carlos A. Marquez, Esq.
- 优先权: JP2002-232623 20020809
- 主分类号: H01L27/082
- IPC分类号: H01L27/082
摘要:
A semiconductor device with high structural reliability and low parasitic capacitance is provided. In one example, the semiconductor device has a surface. The semiconductor device comprises a semiconductor region, wherein an emitter region, a base region, and a collector region are laminated from a side near a substrate of the semiconductor region; an insulating protection layer disposed on the surface; and a wiring layer disposed on the surface, the insulating protection layer forming a via hole from the side of the substrate of the semiconductor region, the via hole being formed to allow the wiring layer to make a contact to an electrode of the emitter region from a side of the substrate where the emitter region, the base region, and the collector region are laminated and where the semiconductor region is isolated.
公开/授权文献
信息查询
IPC分类: