- 专利标题： Methods and systems for processing a substrate using a dynamic liquid meniscus
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申请号： US10404692申请日： 2003-03-31
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公开(公告)号： US06988327B2公开(公告)日： 2006-01-24
- 发明人: James P. Garcia , John M. de Larios , Michael Ravkin , Fred C. Redeker , Carl Woods
- 申请人： James P. Garcia , John M. de Larios , Michael Ravkin , Fred C. Redeker , Carl Woods
- 申请人地址： US CA Fremont
- 专利权人： Lam Research Corporation
- 当前专利权人： Lam Research Corporation
- 当前专利权人地址： US CA Fremont
- 代理机构： Martine Penilla & Gencarella, LLP
- 主分类号： F26B5/04
- IPC分类号： F26B5/04
摘要：
A system and method of moving a meniscus from a first surface to a second surface includes forming a meniscus between a head and a first surface. The meniscus can be moved from the first surface to an adjacent second surface, the adjacent second surface being parallel to the first surface. The system and method of moving the meniscus can also be used to move the meniscus along an edge of a substrate.