- 专利标题： Film thickness measuring method and measuring apparatus for organic thin film for use in organic electroluminesce device
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申请号： US10389751申请日： 2003-03-18
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公开(公告)号： US06992781B2公开(公告)日： 2006-01-31
- 发明人: Hiroyuki Okada , Miki Shibata , Tadahiro Echigo , Shigeki Naka , Hiroyoshi Onnagawa
- 申请人： Hiroyuki Okada , Miki Shibata , Tadahiro Echigo , Shigeki Naka , Hiroyoshi Onnagawa
- 申请人地址： JP Toyama
- 专利权人： President of Toyama University
- 当前专利权人： President of Toyama University
- 当前专利权人地址： JP Toyama
- 代理机构： Oblon, Spivak, McClelland, Maier & Neustadt, P.C.
- 优先权： JP2002-086992 20020326
- 主分类号： H01L27/15
- IPC分类号： H01L27/15 ; G01B11/28
摘要：
A method for measuring a relative thickness distribution of an organic thin film for use in an organic electroluminescence device comprises the steps of irradiating a predetermined region of the organic thin film with a light including an ultraviolet light, measuring the intensity of a fluorescence produced by the organic thin film in response to the light irradiation, and obtaining a film thickness of the predetermined region from the intensity of the fluorescence. Further, an apparatus for measuring a thickness distribution for use in an organic electroluminescence device has means for irradiating a predetermined region of the organic thin film with a light including an ultraviolet light, means for measuring the intensity of a fluorescence produced by the organic thin film, and means for obtaining the film thickness of the predetermined region from the intensity of the fluorescence.
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