Invention Grant
- Patent Title: Strain sensor patterned on MEMS flex arms
- Patent Title (中): 应变传感器图案化在MEMS柔性臂上
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Application No.: US10463775Application Date: 2003-06-17
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Publication No.: US07000459B2Publication Date: 2006-02-21
- Inventor: Jason W. Riddering , Wayne A. Bonin , Zine-Eddine Boutaghou , Roger L. Hipwell, Jr.
- Applicant: Jason W. Riddering , Wayne A. Bonin , Zine-Eddine Boutaghou , Roger L. Hipwell, Jr.
- Applicant Address: US CA Scotts Valley
- Assignee: Seagate Technology LLC
- Current Assignee: Seagate Technology LLC
- Current Assignee Address: US CA Scotts Valley
- Agency: Westman, Champlin & Kelly
- Main IPC: G01B5/28
- IPC: G01B5/28

Abstract:
A micromechanical assembly couples to a positioning member and to a body having an aerodynamic surface subject to aerodynamic forces. The micromechanical assembly comprises a substrate including a flexible beam joining a first substrate portion that is attachable to the positioning member to a second substrate portion that is attachable to the body. The substrate includes a substrate surface extending at least over the flexible beam. A lithographic pattern is formed on the substrate surface. The lithographic pattern includes at least a first impedance element that senses flexing of the flexible beam. Contact pads are coupled to the lithographic pattern for coupling to a flex measurement circuit.
Public/Granted literature
- US20040007076A1 Strain sensor patterned on MEMS flex arms Public/Granted day:2004-01-15
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