- 专利标题: Apparatus and method for manufacturing semiconductor grains
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申请号: US10277610申请日: 2002-10-21
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公开(公告)号: US07001543B2公开(公告)日: 2006-02-21
- 发明人: Nobuyuki Kitahara , Toshio Suzuki , Noboru Suda , Shin Sugawara , Hisao Arimune
- 申请人: Nobuyuki Kitahara , Toshio Suzuki , Noboru Suda , Shin Sugawara , Hisao Arimune
- 申请人地址: JP Kyoto
- 专利权人: Kyocera Corporation
- 当前专利权人: Kyocera Corporation
- 当前专利权人地址: JP Kyoto
- 代理机构: Hogan & Hartson LLP
- 优先权: JP2001-325471 20011023; JP2001-361551 20011127; JP2001-392776 20011225; JP2002-020777 20020129
- 主分类号: B29B9/10
- IPC分类号: B29B9/10
摘要:
A crucible is formed of a cylindrical body member and a disk-shaped nozzle member fitted to the bottom portion of the body member, and the nozzle member is provided with a nozzle hole for discharging out a semiconductor molten solution dropwise therethrough. The semiconductor molten solution drops discharged out of the crucible through the nozzle hole are cooled and solidified during falling to become semiconductor grains. Silicon grains having high crystal quality can be manufactured at low cost.
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