Device for feeding educts to parallel spaces
Abstract:
A device feeds educts to parallel spaces separated from one another by way of a distributor unit. Outlets of the distributor unit are assigned to the spaces, and evaporator structures for the evaporation of liquid media are provided in the spaces. Each outlet of the distributor unit project into a space. The boiling point of the medium in the distributor unit is maintained above the temperature of the medium in the distributor unit.
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