发明授权
US07002284B2 Thin-film micromechanical resonator, thin-film micromechanical resonator gyro, and navigation system and automobile using the resonator gyro
有权
薄膜微机械谐振器,薄膜微机械谐振陀螺,以及使用谐振陀螺的导航系统和汽车
- 专利标题: Thin-film micromechanical resonator, thin-film micromechanical resonator gyro, and navigation system and automobile using the resonator gyro
- 专利标题(中): 薄膜微机械谐振器,薄膜微机械谐振陀螺,以及使用谐振陀螺的导航系统和汽车
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申请号: US10470669申请日: 2002-11-26
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公开(公告)号: US07002284B2公开(公告)日: 2006-02-21
- 发明人: Satoshi Ouchi , Toshiyuki Nozoe , Koji Nomura , Hirofumi Tajika
- 申请人: Satoshi Ouchi , Toshiyuki Nozoe , Koji Nomura , Hirofumi Tajika
- 申请人地址: JP Osaka
- 专利权人: Matsushita Electric Industrial Co., Ltd.
- 当前专利权人: Matsushita Electric Industrial Co., Ltd.
- 当前专利权人地址: JP Osaka
- 代理机构: RatnerPrestia
- 优先权: JP2001-360560 20011127; JP2002-300116 20021015
- 国际申请: PCT/JP02/12310 WO 20021126
- 国际公布: WO03/052350 WO 20030626
- 主分类号: H03H9/21
- IPC分类号: H03H9/21
摘要:
A thin film micromechanical resonator (resonator) having improved drive efficiency, a resonator gyro having improved sensitivity in detecting an angular velocity, and a navigation system and an automobile using the resonator gyro. The resonator includes a tuning fork structure made of a non-piezoelectric material, and a first electrode and a second electrode disposed respectively at the inner side and the outer side of the tuning fork arm. On the first and second electrodes, a first piezo film and a second piezo film are provided respectively, and a third electrode and a fourth are respectively provided electrode thereon. When an alternating voltage is applied to the third and fourth electrodes at the opposite phases each other, the tuning fork resonates in the direction perpendicular to the center line. The resonator gyro detects, at the sensing section which is formed of another electrodes and another piezo film, the Coriolis force generated in proportion to angular velocity given to the resonator.
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