Thin-film micromechanical resonator, thin-film micromechanical resonator gyro, and navigation system and automobile using the resonator gyro
    1.
    发明授权
    Thin-film micromechanical resonator, thin-film micromechanical resonator gyro, and navigation system and automobile using the resonator gyro 有权
    薄膜微机械谐振器,薄膜微机械谐振陀螺,以及使用谐振陀螺的导航系统和汽车

    公开(公告)号:US07002284B2

    公开(公告)日:2006-02-21

    申请号:US10470669

    申请日:2002-11-26

    IPC分类号: H03H9/21

    摘要: A thin film micromechanical resonator (resonator) having improved drive efficiency, a resonator gyro having improved sensitivity in detecting an angular velocity, and a navigation system and an automobile using the resonator gyro. The resonator includes a tuning fork structure made of a non-piezoelectric material, and a first electrode and a second electrode disposed respectively at the inner side and the outer side of the tuning fork arm. On the first and second electrodes, a first piezo film and a second piezo film are provided respectively, and a third electrode and a fourth are respectively provided electrode thereon. When an alternating voltage is applied to the third and fourth electrodes at the opposite phases each other, the tuning fork resonates in the direction perpendicular to the center line. The resonator gyro detects, at the sensing section which is formed of another electrodes and another piezo film, the Coriolis force generated in proportion to angular velocity given to the resonator.

    摘要翻译: 具有改进的驱动效率的薄膜微机械谐振器(谐振器),在检测角速度方面具有改进的灵敏度的谐振器陀螺仪以及使用谐振器陀螺仪的导航系统和汽车。 谐振器包括由非压电材料制成的音叉结构,以及分别设置在音叉臂的内侧和外侧的第一电极和第二电极。 在第一和第二电极上分别设置第一压电膜和第二压电膜,第三电极和第四电极分别设置有电极。 当交替电压以相反的相位施加到第三和第四电极时,音叉在垂直于中心线的方向上共振。 谐振器陀螺仪在由另一个电极和另一个压电膜形成的感测部分检测到与给予谐振器的角速度成比例地产生的科里奥利力。

    Angular velocity sensor
    2.
    发明授权
    Angular velocity sensor 失效
    角速度传感器

    公开(公告)号:US06666091B2

    公开(公告)日:2003-12-23

    申请号:US10111575

    申请日:2002-08-23

    IPC分类号: G01P904

    CPC分类号: G01C19/5607

    摘要: An angular velocity sensor with improved detection chacteristics using a tuning fork vibrator made of a single crystalline piezoelectric material such as quartz. The turning fork vibrator includes two vibrators bonded together to provide an integral structure so that the vibrators by their respective crystal axis directions generate a piezoelectric phenomena in inverse polarities in their width directions. The tuning fork vibrator has two tuning fork arms and a tuning fork base. Two detection electrodes are respectively disposed on outer faces of the two tuning fork arms. And two other detection electrodes are respectively disposed on inner faces of the two tuning fork arms. Two drive electrodes are respectively disposed on the two tunings fork arms. The two detection electrodes disposed on the outer faces of the two tuning fork arms are commonly connected, and the two detection electrodes disposed on the inner faces of the two tuning fork arms are commonly connected for canceling capacitive coupling from drive section to detecting section.

    摘要翻译: 具有改进的检测特性的角速度传感器,使用由诸如石英的单晶压电材料制成的音叉振子。 转叉振动器包括两个结合在一起以提供整体结构的振动器,使得振动器通过其各自的晶轴方向在其宽度方向上产生相反极性的压电现象。 音叉振子具有两个音叉臂和音叉基座。 两个检测电极分别设置在两个音叉臂的外表面上。 另外两个检测电极分别设置在两个音叉臂的内表面上。 两个驱动电极分别设置在两个调音叉臂上。 设置在两个音叉臂的外表面上的两个检测电极共同连接,并且布置在两个音叉臂的内表面上的两个检测电极共同连接,用于消除从驱动部分到检测部分的电容耦合。

    Piezoelectric device, electronic device using the same, and automobile
    3.
    发明授权
    Piezoelectric device, electronic device using the same, and automobile 失效
    压电元件,使用其的电子装置,以及汽车

    公开(公告)号:US08013500B2

    公开(公告)日:2011-09-06

    申请号:US12680641

    申请日:2008-11-05

    IPC分类号: H01L41/08

    摘要: A piezoelectric device according to the present invention includes lead wires (12) each having one end electrically connected to a circuit pattern, and a piezoelectric oscillator (13) made of quartz and having terminals (13a) electrically connected to the other ends of the lead wires (12), wherein the terminals (13a) of the piezoelectric oscillator (13) and the lead wires (12) are respectively capacitively coupled with each other via an insulation layer (14). According to the structure, the piezoelectric device can reduce its vertical height.

    摘要翻译: 根据本发明的压电装置包括:一端电连接到电路图形的引线(12)和由石英制成的具有与引线的另一端电连接的端子(13a)的压电振荡器(13) 电线(12),其中压电振子(13)的端子(13a)和引线(12)分别经由绝缘层(14)电容耦合。 根据该结构,压电装置可以降低其垂直高度。

    PIEZOELECTRIC DEVICE, ELECTRONIC DEVICE USING THE SAME, AND AUTOMOBILE
    4.
    发明申请
    PIEZOELECTRIC DEVICE, ELECTRONIC DEVICE USING THE SAME, AND AUTOMOBILE 有权
    压电器件,使用其的电子器件和汽车

    公开(公告)号:US20100219723A1

    公开(公告)日:2010-09-02

    申请号:US12680801

    申请日:2008-11-07

    IPC分类号: H01L41/053

    摘要: A piezoelectric device according to the present invention includes lead wires (12) each having one end electrically connected to a circuit pattern, and a piezoelectric oscillator (13) having terminals (13a) electrically connected to the other ends of the lead wires (12), wherein the piezoelectric oscillator (13) is retained in suspension by the other ends of the lead wires (12), and a support member (14) is provided on surfaces (12b) opposite to connecting surfaces (12a) of the lead wires (12) connected to the piezoelectric oscillator (13) at the other ends thereof.

    摘要翻译: 根据本发明的压电装置包括:一端电连接到电路图形的引线(12)和具有与导线(12)的另一端电连接的端子(13a)的压电振荡器(13) ,其中所述压电振荡器(13)由所述引线(12)的另一端保持悬挂,并且在与所述引线(12)的连接表面(12a)相对的表面(12b)上设置有支撑构件(14) 12)在其另一端连接到压电振荡器(13)。

    Angular velocity sensor
    5.
    发明申请
    Angular velocity sensor 有权
    角速度传感器

    公开(公告)号:US20070163345A1

    公开(公告)日:2007-07-19

    申请号:US10589966

    申请日:2005-02-14

    申请人: Toshiyuki Nozoe

    发明人: Toshiyuki Nozoe

    IPC分类号: G01P9/04 G01P21/00 G01P1/04

    CPC分类号: G01C19/5607

    摘要: An angular velocity sensor is provided, which is capable of accurate failure diagnosis on a detecting portion despite of its simple configuration and small size without providing additional means on an oscillator separately from the driving portion and a detecting portion. When a check signal for carrying out failure diagnosis is input to terminal (54) from outside, the degree of amplification at amplifier (45) is decreased, and the degree of amplification at amplifier (44) is simultaneously increased by an operation of AGC circuit (43). As a result, a driving signal having the decreased amplitude can be obtained at terminals (50) and (53), and a driving signal having the increased amplitude can be obtained at terminals (51) and (52). The driving signals are supplied to one driving electrode and another driving electrode, respectively, of a pair of driving electrodes spaced from each other across the center of the arm of a tuning fork type oscillator through terminals (50) to (53).

    摘要翻译: 提供了一种角速度传感器,其能够对检测部分进行精确的故障诊断,尽管其结构简单且尺寸小,而不需要在与驱动部分和检测部分分开的振荡器上提供附加装置。 当从外部向终端(54)输入用于执行故障诊断的检查信号时,放大器(45)的放大度减小,放大器(44)的放大程度通过AGC电路的操作同时增加 (43)。 结果,可以在端子(50)和(53)处获得具有减小的振幅的驱动信号,并且可以在端子(51)和(52)处获得具有增加的振幅的驱动信号。 分别通过端子(50)至(53)将一对驱动电极的驱动信号分别提供给跨音叉型振荡器的臂的中心彼此隔开的一个驱动电极和另一个驱动电极。

    Angular velocity sensor
    6.
    发明授权
    Angular velocity sensor 有权
    角速度传感器

    公开(公告)号:US06732586B2

    公开(公告)日:2004-05-11

    申请号:US10300937

    申请日:2002-11-21

    IPC分类号: G01C1900

    CPC分类号: G01P21/02 G01C19/5607

    摘要: The present invention presents an angular velocity sensor having a self diagnosis function. An angular velocity sensor of the present invention includes a driving part for stably vibrating a driving part of a sensor element having a driver part and a detector part for detecting an angular velocity. The angular velocity sensor also includes a detection means for detecting the angular velocity of the sensor element. The angular velocity sensor obtains a self diagnosis signal for a malfunction by detecting a mechanical coupling signal obtained at the detection means.

    摘要翻译: 本发明提供一种具有自诊断功能的角速度传感器。 本发明的角速度传感器包括用于稳定地振动具有驱动器部分的传感器元件的驱动部分和用于检测角速度的检测器部分的驱动部件。 角速度传感器还包括用于检测传感器元件的角速度的检测装置。 角速度传感器通过检测在检测装置获得的机械耦合信号来获得用于故障的自诊断信号。

    Angular velocity sensor
    7.
    发明授权
    Angular velocity sensor 有权
    角速度传感器

    公开(公告)号:US06386034B1

    公开(公告)日:2002-05-14

    申请号:US09485626

    申请日:2000-05-08

    申请人: Toshiyuki Nozoe

    发明人: Toshiyuki Nozoe

    IPC分类号: G01P904

    CPC分类号: G01C19/5607

    摘要: An angular rate sensor comprises a determination circuit (30) for inputting an output signal of a full-wave rectifier circuit (22) and an output signal after amplified by a charge amplifier (25), and making a determination of abnormality, and an output clamping circuit (32) activated by an output signal of the determination circuit (30), if it makes a determination of abnormality, for clamping an output signal of a sensor output terminal at a level close to a power supply voltage or a grounding voltage.

    摘要翻译: 角速率传感器包括用于输入全波整流电路(22)的输出信号的确定电路(30)和由电荷放大器(25)放大后的输出信号,并且判定异常 钳位电路(32)由确定电路(30)的输出信号激活,如果确定异常,则将传感器输出端子的输出信号钳位在接近电源电压或接地电压的电平。

    Angular velocity sensor
    8.
    发明授权
    Angular velocity sensor 有权
    角速度传感器

    公开(公告)号:US06244095B1

    公开(公告)日:2001-06-12

    申请号:US09332162

    申请日:1999-06-14

    IPC分类号: G01V1300

    摘要: The present invention aims to present an angular velocity sensor having a self diagnosis function. An angular velocity sensor of the present invention includes a driving part for stably vibrating a driving part of a sensor element having a driver part and a detector part for detecting an angular velocity and detection means for detecting the angular velocity of the sensor element and obtains a self diagnosis signal for a malfunction by detecting a mechanical coupling signal obtained at the detection means.

    摘要翻译: 本发明的目的在于提供一种具有自诊断功能的角速度传感器。 本发明的角速度传感器包括用于稳定地振动具有驱动器部分的传感器元件的驱动部分和用于检测角速度的检测器部分的驱动部分和用于检测传感器元件的角速度的检测装置,并且获得 通过检测在检测装置获得的机械耦合信号来发生故障的自诊断信号。

    Electronic device
    9.
    发明授权
    Electronic device 有权
    电子设备

    公开(公告)号:US08830077B2

    公开(公告)日:2014-09-09

    申请号:US12741467

    申请日:2008-11-18

    摘要: An electronic device includes a case, an angular velocity sensor fixed to the case, a data memory storing plural reference profiles, an output unit operating in a plurality of operation modes corresponding to the reference profiles, and a processor controlling the output unit. The angular velocity sensor sends a signal according to an angular velocity applied to the case. The processor is operable to receive the signal sent from the angular velocity sensor, to select a reference profile out of the plural reference profiles according to the received signal, and to cause the output unit to operate in an operation mode out of the plural operation modes corresponding to the selected reference profile. A user can operate this electronic device with a quick response.

    摘要翻译: 电子设备包括壳体,固定在壳体上的角速度传感器,存储多个参考曲线的数据存储器,以对应于参考曲线的多个操作模式操作的输出单元,以及控制输出单元的处理器。 角速度传感器根据施加到壳体的角速度发送信号。 处理器可操作以接收从角速度传感器发送的信号,以根据接收到的信号从多个参考轮廓中选择参考轮廓,并且使得输出单元在多种操作模式中的操作模式中操作 对应于所选择的参考轮廓。 用户可以快速响应操作该电子设备。

    Sensor
    10.
    发明授权
    Sensor 有权
    传感器

    公开(公告)号:US08201449B2

    公开(公告)日:2012-06-19

    申请号:US12441451

    申请日:2007-11-09

    摘要: A sensor includes detecting element (28) with an acceleration sensor, which is formed of weight (18) coupled to rigid section (14) via flexible section (16), substrate (10) confronting weight (18), and an electrode section including opposed electrodes (20, 22, 24, 26) placed on respective opposed faces of weight (18) and substrate (10). This structure prevents weight (18) from moving along Z-axis, so that a detection accuracy of acceleration occurring along X-axis or Y-axis can be improved.

    摘要翻译: 传感器包括具有加速度传感器的检测元件(28),所述加速度传感器由通过柔性部分(16),与基座(10)相对的重量(18)耦合到刚性部分(14)的重物(18)和包括 相对的电极(20,22,24,26)放置在重物(18)和基底(10)的相对的相对面上。 这种结构可防止重量(18)沿Z轴移动,从而可以提高沿X轴或Y轴发生的加速度的检测精度。