摘要:
A thin film micromechanical resonator (resonator) having improved drive efficiency, a resonator gyro having improved sensitivity in detecting an angular velocity, and a navigation system and an automobile using the resonator gyro. The resonator includes a tuning fork structure made of a non-piezoelectric material, and a first electrode and a second electrode disposed respectively at the inner side and the outer side of the tuning fork arm. On the first and second electrodes, a first piezo film and a second piezo film are provided respectively, and a third electrode and a fourth are respectively provided electrode thereon. When an alternating voltage is applied to the third and fourth electrodes at the opposite phases each other, the tuning fork resonates in the direction perpendicular to the center line. The resonator gyro detects, at the sensing section which is formed of another electrodes and another piezo film, the Coriolis force generated in proportion to angular velocity given to the resonator.
摘要:
An angular velocity sensor with improved detection chacteristics using a tuning fork vibrator made of a single crystalline piezoelectric material such as quartz. The turning fork vibrator includes two vibrators bonded together to provide an integral structure so that the vibrators by their respective crystal axis directions generate a piezoelectric phenomena in inverse polarities in their width directions. The tuning fork vibrator has two tuning fork arms and a tuning fork base. Two detection electrodes are respectively disposed on outer faces of the two tuning fork arms. And two other detection electrodes are respectively disposed on inner faces of the two tuning fork arms. Two drive electrodes are respectively disposed on the two tunings fork arms. The two detection electrodes disposed on the outer faces of the two tuning fork arms are commonly connected, and the two detection electrodes disposed on the inner faces of the two tuning fork arms are commonly connected for canceling capacitive coupling from drive section to detecting section.
摘要:
A piezoelectric device according to the present invention includes lead wires (12) each having one end electrically connected to a circuit pattern, and a piezoelectric oscillator (13) made of quartz and having terminals (13a) electrically connected to the other ends of the lead wires (12), wherein the terminals (13a) of the piezoelectric oscillator (13) and the lead wires (12) are respectively capacitively coupled with each other via an insulation layer (14). According to the structure, the piezoelectric device can reduce its vertical height.
摘要:
A piezoelectric device according to the present invention includes lead wires (12) each having one end electrically connected to a circuit pattern, and a piezoelectric oscillator (13) having terminals (13a) electrically connected to the other ends of the lead wires (12), wherein the piezoelectric oscillator (13) is retained in suspension by the other ends of the lead wires (12), and a support member (14) is provided on surfaces (12b) opposite to connecting surfaces (12a) of the lead wires (12) connected to the piezoelectric oscillator (13) at the other ends thereof.
摘要:
An angular velocity sensor is provided, which is capable of accurate failure diagnosis on a detecting portion despite of its simple configuration and small size without providing additional means on an oscillator separately from the driving portion and a detecting portion. When a check signal for carrying out failure diagnosis is input to terminal (54) from outside, the degree of amplification at amplifier (45) is decreased, and the degree of amplification at amplifier (44) is simultaneously increased by an operation of AGC circuit (43). As a result, a driving signal having the decreased amplitude can be obtained at terminals (50) and (53), and a driving signal having the increased amplitude can be obtained at terminals (51) and (52). The driving signals are supplied to one driving electrode and another driving electrode, respectively, of a pair of driving electrodes spaced from each other across the center of the arm of a tuning fork type oscillator through terminals (50) to (53).
摘要:
The present invention presents an angular velocity sensor having a self diagnosis function. An angular velocity sensor of the present invention includes a driving part for stably vibrating a driving part of a sensor element having a driver part and a detector part for detecting an angular velocity. The angular velocity sensor also includes a detection means for detecting the angular velocity of the sensor element. The angular velocity sensor obtains a self diagnosis signal for a malfunction by detecting a mechanical coupling signal obtained at the detection means.
摘要:
An angular rate sensor comprises a determination circuit (30) for inputting an output signal of a full-wave rectifier circuit (22) and an output signal after amplified by a charge amplifier (25), and making a determination of abnormality, and an output clamping circuit (32) activated by an output signal of the determination circuit (30), if it makes a determination of abnormality, for clamping an output signal of a sensor output terminal at a level close to a power supply voltage or a grounding voltage.
摘要:
The present invention aims to present an angular velocity sensor having a self diagnosis function. An angular velocity sensor of the present invention includes a driving part for stably vibrating a driving part of a sensor element having a driver part and a detector part for detecting an angular velocity and detection means for detecting the angular velocity of the sensor element and obtains a self diagnosis signal for a malfunction by detecting a mechanical coupling signal obtained at the detection means.
摘要:
An electronic device includes a case, an angular velocity sensor fixed to the case, a data memory storing plural reference profiles, an output unit operating in a plurality of operation modes corresponding to the reference profiles, and a processor controlling the output unit. The angular velocity sensor sends a signal according to an angular velocity applied to the case. The processor is operable to receive the signal sent from the angular velocity sensor, to select a reference profile out of the plural reference profiles according to the received signal, and to cause the output unit to operate in an operation mode out of the plural operation modes corresponding to the selected reference profile. A user can operate this electronic device with a quick response.
摘要:
A sensor includes detecting element (28) with an acceleration sensor, which is formed of weight (18) coupled to rigid section (14) via flexible section (16), substrate (10) confronting weight (18), and an electrode section including opposed electrodes (20, 22, 24, 26) placed on respective opposed faces of weight (18) and substrate (10). This structure prevents weight (18) from moving along Z-axis, so that a detection accuracy of acceleration occurring along X-axis or Y-axis can be improved.