发明授权
- 专利标题: Ultraviolet detector and manufacture method thereof
- 专利标题(中): 紫外检测器及其制造方法
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申请号: US10622348申请日: 2003-07-19
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公开(公告)号: US07009185B2公开(公告)日: 2006-03-07
- 发明人: Gou-Chung Chi , Iinn-Kong Sheu , Meng-Che Chen , Min-Lum Lee
- 申请人: Gou-Chung Chi , Iinn-Kong Sheu , Meng-Che Chen , Min-Lum Lee
- 申请人地址: TW Taoyuan
- 专利权人: National Central University
- 当前专利权人: National Central University
- 当前专利权人地址: TW Taoyuan
- 优先权: TW92107536A 20030402
- 主分类号: G01J1/42
- IPC分类号: G01J1/42
摘要:
The present invention relates to an ultraviolet detector and manufacture method thereof, in which a buffer layer is formed on a baseplate and a P-type GaN layer is formed on the baseplate by using epitaxial method. By availing ion-distribution-and-vegetation technology, a first N-type GaN layer is vegetated and invested in the P-type GaN layer by distributing and vegetating Si+ ions in that layer, and a second N-type GaN layer having a thicker ion concentration is invested in the N-type GaN layer. Finally, an annular and a circular metallic layer are formed between the P-type GaN layer and the first N-type GaN layer as well as inside the second N-type GaN layer, respectively, to serve for respective ohmic contact layers. The present invention is characterized in that an incident light can project upon a depletion layer of the GaN planar structure to have the detection efficiency significantly improved.
公开/授权文献
- US20040195518A1 Ultraviolet detector and manufacture method thereof 公开/授权日:2004-10-07
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