Invention Grant
- Patent Title: Gate-contact structure and method for forming the same
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Application No.: US11029832Application Date: 2005-01-04
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Publication No.: US07015087B2Publication Date: 2006-03-21
- Inventor: Sun-Young Kim , Woon-Kyung Lee , Dong-Whee Kwon
- Applicant: Sun-Young Kim , Woon-Kyung Lee , Dong-Whee Kwon
- Applicant Address: KR Suwon-si
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Suwon-si
- Agency: Marger Johnson & McCollom, P.C.
- Priority: KR2001-74862 20011129
- Main IPC: H01L21/8234
- IPC: H01L21/8234

Abstract:
A gate-contact structure and a method for forming the same are provided. The structure includes a device isolation layer pattern formed at a semiconductor substrate to define an active region; and a gate electrode and a capping pattern, which are sequentially stacked on the semiconductor substrate across the device isolation layer pattern. The capping pattern includes a first gate contact hole that exposes a top surface of the gate electrode. An interlayer insulation layer pattern including a second gate contact hole is disposed to cover an entire surface of the semiconductor substrate including the gate electrode and the capping pattern. The second gate contact hole penetrates the first gate contact hole to expose the top surface of the gate electrode. A gate contact plug is disposed to be connected to the top surface of the gate electrode through the second gate contact hole. Accordingly, the interlayer insulation layer pattern is intervened between the gate contact plug and a sidewall of the capping pattern.
Public/Granted literature
- US20050118798A1 Gate-contact structure and method for forming the same Public/Granted day:2005-06-02
Information query
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