- 专利标题: Double gate field effect transistor and method of manufacturing the same
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申请号: US10917026申请日: 2004-08-11
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公开(公告)号: US07015106B2公开(公告)日: 2006-03-21
- 发明人: Jae-Man Yoon , Dong-gun Park , Gyo-young Jin , Yoshida Makoto , Tai-su Park
- 申请人: Jae-Man Yoon , Dong-gun Park , Gyo-young Jin , Yoshida Makoto , Tai-su Park
- 申请人地址: KR Suwon-si
- 专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人地址: KR Suwon-si
- 代理机构: Marger Johnson & McCollom, P.C.
- 优先权: KR10-2003-0064153 20030916
- 主分类号: H01L21/336
- IPC分类号: H01L21/336 ; H01L21/00 ; H01L21/338
摘要:
Provided is a double gate field effect transistor and a method of manufacturing the same. The method of manufacturing the double gate field effect transistor comprises forming as many fins as required by etching a silicon substrate, masking the resultant product by an insulating material such as silicon nitride, forming trench regions for device isolation and STI film by using the silicon nitride mask, forming gate oxide films on both faces of the fins after removing the hard mask, and forming a gate line. As such, unnecessary channel formation under the silicon oxide film, when a voltage higher than a threshold voltage is applied to the substrate, is prevented by forming a thick silicon oxide film on the substrate on which no protruding fins are formed.
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