发明授权
- 专利标题: Selectable dual position magnetron
- 专利标题(中): 可选双位磁控管
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申请号: US10949735申请日: 2004-09-23
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公开(公告)号: US07018515B2公开(公告)日: 2006-03-28
- 发明人: Tza-Jing Gung , Hong S. Yang , Anantha K. Subramani , Maurice E. Ewert , Keith A. Miller , Vincent E. Burkhart
- 申请人: Tza-Jing Gung , Hong S. Yang , Anantha K. Subramani , Maurice E. Ewert , Keith A. Miller , Vincent E. Burkhart
- 申请人地址: US CA Santa Clara
- 专利权人: Applied Materials, Inc.
- 当前专利权人: Applied Materials, Inc.
- 当前专利权人地址: US CA Santa Clara
- 代理商 Charles S. Guenzer
- 主分类号: C23C14/35
- IPC分类号: C23C14/35
摘要:
A dual-position magnetron that is rotated about a central axis in back of a sputtering target, particularly for sputtering an edge of a target of a barrier material onto a wafer and cleaning material redeposited at a center of the target. During target cleaning, wafer bias is reduced. In one embodiment, an arc-shaped magnetron is supported on a pivot arm pivoting on the end of a bracket fixed to the rotary shaft. A spring biases the pivot arm such that the magnetron is urged towards and overlies the target center. Centrifugal force at increased rotation rate overcomes the spring bias and shift the magnetron to an outer position with the long magnetron dimension aligned with the target edge. Mechanical stops prevent excessive movement in either direction. Other mechanisms include linear slides and actuators.
公开/授权文献
- US20050211548A1 Selectable dual position magnetron 公开/授权日:2005-09-29
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