Invention Grant
- Patent Title: Hidden flexure ultra planar optical routing element
- Patent Title (中): 隐藏式弯曲超平面光路由元件
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Application No.: US10619940Application Date: 2003-07-14
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Publication No.: US07019885B2Publication Date: 2006-03-28
- Inventor: M. Adrian Michalicek
- Applicant: M. Adrian Michalicek
- Applicant Address: US CA San Jose
- Assignee: PTS Corporation
- Current Assignee: PTS Corporation
- Current Assignee Address: US CA San Jose
- Agency: Townsend and Townsend and Crew LLP
- Main IPC: G02B26/00
- IPC: G02B26/00 ; H01L41/04

Abstract:
The present invention provides improved MEMS devices and methods for use with fiber-optic communications systems. In one embodiment, an apparatus for steering light has a beam layer (160) with a reflective surface. The device uses a multi-layer electrode stack underlying the beam layer to rotate the beam layer into a desired position. Additionally, an underlying rotation and support structure provides a stable platform for the beam layer when the device is activated. In one embodiment, the underlying structure provides a multi-point landing system to maintain a generally flat beam layer upper surface when the device is activated.
Public/Granted literature
- US20040085607A1 Hidden flexure ultra planar optical routing element Public/Granted day:2004-05-06
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