发明授权
- 专利标题: Gas gauge proximity sensor with a modulated gas flow
- 专利标题(中): 具有调制气流的气量计接近传感器
-
申请号: US10854429申请日: 2004-05-27
-
公开(公告)号: US07021121B2公开(公告)日: 2006-04-04
- 发明人: Earl W. Ebert , Daniel N. Galburt , Joseph H. Lyons
- 申请人: Earl W. Ebert , Daniel N. Galburt , Joseph H. Lyons
- 申请人地址: NL Veldhoven
- 专利权人: ASML Holding N.V.
- 当前专利权人: ASML Holding N.V.
- 当前专利权人地址: NL Veldhoven
- 代理机构: Sterne, Kessler, Goldstein & Fox P.L.L.C.
- 主分类号: G01B13/08
- IPC分类号: G01B13/08
摘要:
A gas gauge proximity sensor modulates a gas stream that is used to feed reference and measurement air gauges, respectively, in a reference portion proximate a reference surface and a measurement portion proximate a measurement surface. The gas stream can be modulated at a frequency at which there is minimal acoustical interference energy (e.g., minimal noise) in demodulated output signal. The sensor output can be filtered so that a measurement signal includes only the modulated frequency and side bands of that frequency to include the desired response band of the device as a whole. The filtered signal can be demodulated using a demodulator operating at a same frequency as the modulator to produce the demodulated output signal. In this embodiment, substantially only ambient acoustical energy in the band pass region may interfere with the device operation. Alternatively, the modulation can be introduced through the reference portion. A reference nozzle sets up a pressure field with the reference surface. A carrier frequency can be generated by mechanical motion of the reference surface. For example, this motion can be introduced by a mechanism like a piezoelectric device or a voice coil coupled to the reference surface. The modulated gas flow combines with the other gas flows to produce a modulated combined gas flow.
公开/授权文献
- US20050274173A1 Gas gauge proximity sensor with a modulated gas flow 公开/授权日:2005-12-15
信息查询