Invention Grant
- Patent Title: Filters employing porous strongly acidic polymers
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Application No.: US10647656Application Date: 2003-08-25
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Publication No.: US07022164B2Publication Date: 2006-04-04
- Inventor: Oleg Kishkovich , Robert W. Rezuke , Devon Kinkead
- Applicant: Oleg Kishkovich , Robert W. Rezuke , Devon Kinkead
- Applicant Address: US MA Billerica
- Assignee: Mykrolis Corporation
- Current Assignee: Mykrolis Corporation
- Current Assignee Address: US MA Billerica
- Agency: Weingarten, Schurgin, Gagnebin & Lebovici LLP
- Main IPC: B01D53/02
- IPC: B01D53/02 ; B01J20/26

Abstract:
A clean, high efficiency, low pressure drop, adsorptive filter material that is porous and includes an acidic functional group. The filter can include, for example, a non-woven filter composite has a porous sulfonated divinyl benzene styrene copolymer beads having sulfonic acid functional side groups. The non-woven filter is used to remove molecular bases, including ammonia, organic amines, inides, aminoalcohols, alcoholoamines from the atmosphere used in semiconductor fabrication and other processes that require uncontaminated gaseous environments of high quality.
Public/Granted literature
- US20040154470A1 Filters employing porous strongly acidic polymers Public/Granted day:2004-08-12
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