- 专利标题： Ferroelectric element and actuator using the same, and ink jet head and ink jet recording device
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申请号： US10261984申请日： 2002-10-01
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公开(公告)号： US07023036B2公开(公告)日： 2006-04-04
- 发明人: Osamu Watanabe , Takanori Nakano , Kazunari Chikanawa , Shogo Matsubara , Shintaro Hara , Kazuo Nishimura
- 申请人： Osamu Watanabe , Takanori Nakano , Kazunari Chikanawa , Shogo Matsubara , Shintaro Hara , Kazuo Nishimura
- 申请人地址： JP Osaka
- 专利权人： Matsushita Electric Industrial Co., Ltd.
- 当前专利权人： Matsushita Electric Industrial Co., Ltd.
- 当前专利权人地址： JP Osaka
- 代理机构： Pearne & Gordon LLP
- 优先权： JP2001-306140 20011002; JP2001-328841 20011026
- 主分类号： H01L29/76
- IPC分类号： H01L29/76
摘要：
A ferroelectric element is described which has a structure including a common electrode 11, a ferroelectric film 10 formed on the common electrode 11, an individual electrode 3 formed on the ferroelectric film 10, a lead wire 15 for feeding electric power to the individual electrode 3, which is formed on the same plane as of the individual electrode 3, and a protection film 16 entirely covering the exposed parts of the ferroelectric film 10 and the individual electrode 3, and covering the lead wire 15. The protection film 16 is preferably made of a material whose Young's modulus is smaller than that of the ferroelectric film 10, exactly 1/20 or smaller of the Young's modulus of the ferroelectric film 10. Further, the ferroelectric film is formed with the insulation reinforcing film containing at least one of the elements constituting the ferroelectric film.
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