Invention Grant
- Patent Title: Method and system for yield similarity of semiconductor devices
- Patent Title (中): 半导体器件产量相似性的方法和系统
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Application No.: US10881739Application Date: 2004-06-29
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Publication No.: US07024334B2Publication Date: 2006-04-04
- Inventor: Eugene Wang
- Applicant: Eugene Wang
- Applicant Address: CN Shanghai
- Assignee: Semiconductor Manufacturing International (Shanghai) Corporation
- Current Assignee: Semiconductor Manufacturing International (Shanghai) Corporation
- Current Assignee Address: CN Shanghai
- Agency: Townsend and Townsend and Crew LLP
- Priority: CN200410025413A 20040614
- Main IPC: G06F101/14
- IPC: G06F101/14 ; G06F19/00

Abstract:
A method and system for yield similarity of semiconductor devices. The method includes providing a first plurality of semiconductor devices, providing a second plurality of semiconductor devices, obtaining a first plurality of yields associated with a first yield, and obtaining a second plurality of yields associated with a second yield. Additionally, the method includes performing a first statistical analysis for the first plurality of yields, determining a first statistical distribution, performing a second statistical analysis for the second plurality of yields, and determining a second statistical distribution. Moreover, the method includes processing information associated with the first statistical distribution and the second statistical distribution, and determining an indicator. Also, the method includes processing information associated with the indicator, determining a confidence level, processing information associated with the confidence level, and determining whether the first yield and the second yield are similar.
Public/Granted literature
- US20050278140A1 METHOD AND SYSTEM FOR YIELD SIMILARITY OF SEMICONDUCTOR DEVICES Public/Granted day:2005-12-15
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