发明授权
US07026179B2 Method of manufacturing a semiconductor light emitting device utilizing a nitride III-V compound semiconductor substrate
有权
制造利用氮化物III-V族化合物半导体衬底的半导体发光器件的方法
- 专利标题: Method of manufacturing a semiconductor light emitting device utilizing a nitride III-V compound semiconductor substrate
- 专利标题(中): 制造利用氮化物III-V族化合物半导体衬底的半导体发光器件的方法
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申请号: US10873479申请日: 2004-06-23
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公开(公告)号: US07026179B2公开(公告)日: 2006-04-11
- 发明人: Yasuhiko Suzuki , Takeharu Asano , Motonobu Takeya , Osamu Goto , Shinro Ikeda , Katsuyoshi Shibuya
- 申请人: Yasuhiko Suzuki , Takeharu Asano , Motonobu Takeya , Osamu Goto , Shinro Ikeda , Katsuyoshi Shibuya
- 申请人地址: JP
- 专利权人: Sony Corporation
- 当前专利权人: Sony Corporation
- 当前专利权人地址: JP
- 代理机构: Rader, Fishman & Grauer PLLC
- 代理商 Ronald P. Kananen
- 优先权: JPP2001-257606 20010828
- 主分类号: H01L21/00
- IPC分类号: H01L21/00 ; H01L29/22
摘要:
When GaN or other nitride III-V compound semiconductor layers are grown on a substrate such as a sapphire substrate, thickness x of the substrate relative to thickness y of the nitride III-V compound semiconductor layers is controlled to satisfy 0
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