发明授权
- 专利标题： Adjustable exhaust flow for thermal uniformity
- 专利标题（中）： 可调排气流量，以保持热均匀性
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申请号： US10810978申请日： 2004-03-26
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公开(公告)号： US07026580B2公开(公告)日： 2006-04-11
- 发明人: Yao-Hwan Kao , Jia-Sheng Lee , De-Yuan Lu , Ming-Fa Chen
- 申请人： Yao-Hwan Kao , Jia-Sheng Lee , De-Yuan Lu , Ming-Fa Chen
- 申请人地址： TW
- 专利权人： Taiwan Semiconductor Manufacturing Co., Ltd.
- 当前专利权人： Taiwan Semiconductor Manufacturing Co., Ltd.
- 当前专利权人地址： TW
- 代理机构： Duane Morris LLP
- 主分类号： F27B5/14
- IPC分类号： F27B5/14
摘要：
A method and apparatus for adjusting exhaust flow, and the apparatus has a programmable exhaust control regulator generating a first input signal to a motor control circuit, an exhaust flow meter generating a second input signal to the motor control circuit and a motor driven control valve moved to different positions according to the first and second input signals, the control valve being installed in an exhaust portion of the hot plate apparatus.
公开/授权文献
- US20050211695A1 Adjustable exhaust flow for thermal uniformity 公开/授权日：2005-09-29
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