Invention Grant
- Patent Title: Strained channel on insulator device
- Patent Title (中): 应变绝缘体上的通道
-
Application No.: US11083537Application Date: 2005-03-18
-
Publication No.: US07029994B2Publication Date: 2006-04-18
- Inventor: Chung-Hu Ge , Chao-Hsiung Wang , Chien-Chao Huang , Wen-Chin Lee , Chenming Hu
- Applicant: Chung-Hu Ge , Chao-Hsiung Wang , Chien-Chao Huang , Wen-Chin Lee , Chenming Hu
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee Address: TW Hsin-Chu
- Agency: Slater & Matsil, L.L.P.
- Main IPC: H01L21/20
- IPC: H01L21/20

Abstract:
A semiconductor device 10 includes a substrate 12 (e.g., a silicon substrate) with an insulating layer 14 (e.g., an oxide such as silicon dioxide) disposed thereon. A first semiconducting material layer 16 (e.g., SiGe) is disposed on the insulating layer 14 and a second semiconducting material layer 18 (e.g., Si) is disposed on the first semiconducting material layer 16. The first and second semiconducting material layers 16 and 18 preferably have different lattice constants such that the first semiconducting material layer 16 is compressive and the second semiconducting material layer is tensile 18.
Public/Granted literature
- US20050233552A1 Strained channel on insulator device Public/Granted day:2005-10-20
Information query
IPC分类: