- 专利标题： Method of uniformly coating a substrate
-
申请号： US09895787申请日： 2001-06-30
-
公开(公告)号： US07030039B2公开(公告)日： 2006-04-18
- 发明人: Emir Gurer , Tom Zhong , John Lewellen , Edward C. Lee , Robert P. Mandal , James C. Grambow , Ted C. Bettes , Donald R. Sauer , Edmond R. Ward , Jung-Hoon Chun , Sangjun Han
- 申请人： Emir Gurer , Tom Zhong , John Lewellen , Edward C. Lee , Robert P. Mandal , James C. Grambow , Ted C. Bettes , Donald R. Sauer , Edmond R. Ward , Jung-Hoon Chun , Sangjun Han
- 申请人地址： NL La Veldhoven
- 专利权人： ASML Holding N.V.
- 当前专利权人： ASML Holding N.V.
- 当前专利权人地址： NL La Veldhoven
- 代理机构： Blakely, Sokoloff, Taylor & Zafman
- 主分类号： H01L21/312
- IPC分类号： H01L21/312
摘要：
A method of and an apparatus for coating a substrate with a polymer solution to produce a film of uniform thickness, includes mounting the substrate inside an enclosed housing and passing a control gas, which may be a solvent vapor-bearing gas into the housing through an inlet. The polymer solution is deposited onto the surface of the substrate in the housing and the substrate is then spun. The control gas and any solvent vapor and particulate contaminants suspended in the control gas are exhausted from the housing through an outlet and the solvent vapor concentration is controlled by controlling the temperature of the housing and the solvent from which the solvent vapor-bearing gas is produced. Instead the concentration can be controlled by mixing gases having different solvent concentrations. The humidity of the gas may also be controlled.
公开/授权文献
- US20020098283A1 Method of uniformly coating a substrate 公开/授权日：2002-07-25
信息查询
IPC分类:
