公开(公告)号：US07030039B2

公开(公告)日：2006-04-18

申请号：US09895787

申请日：2001-06-30

申请人： Emir Gurer ,  Tom Zhong ,  John Lewellen ,  Edward C. Lee ,  Robert P. Mandal ,  James C. Grambow ,  Ted C. Bettes ,  Donald R. Sauer ,  Edmond R. Ward ,  Jung-Hoon Chun ,  Sangjun Han

发明人： Emir Gurer ,  Tom Zhong ,  John Lewellen ,  Edward C. Lee ,  Robert P. Mandal ,  James C. Grambow ,  Ted C. Bettes ,  Donald R. Sauer ,  Edmond R. Ward ,  Jung-Hoon Chun ,  Sangjun Han

IPC分类号： H01L21/312

CPC分类号： H01L21/6715 ,  B05C5/0208 ,  B05C5/0245 ,  B05C5/0254 ,  B05D1/005 ,  B05D1/265 ,  B05D3/0486 ,  G03F7/162

摘要： A method of and an apparatus for coating a substrate with a polymer solution to produce a film of uniform thickness, includes mounting the substrate inside an enclosed housing and passing a control gas, which may be a solvent vapor-bearing gas into the housing through an inlet. The polymer solution is deposited onto the surface of the substrate in the housing and the substrate is then spun. The control gas and any solvent vapor and particulate contaminants suspended in the control gas are exhausted from the housing through an outlet and the solvent vapor concentration is controlled by controlling the temperature of the housing and the solvent from which the solvent vapor-bearing gas is produced. Instead the concentration can be controlled by mixing gases having different solvent concentrations. The humidity of the gas may also be controlled.

公开(公告)号：US06977098B2

公开(公告)日：2005-12-20

申请号：US09795924

申请日：2001-02-28

申请人： Emir Gurer ,  Tom Zhong ,  John Lewellen ,  Ed Lee ,  Robert P. Mandal ,  James C. Grambow ,  Ted C. Bettes ,  Donald R. Sauer ,  Edmond R. Ward

发明人： Emir Gurer ,  Tom Zhong ,  John Lewellen ,  Ed Lee ,  Robert P. Mandal ,  James C. Grambow ,  Ted C. Bettes ,  Donald R. Sauer ,  Edmond R. Ward

IPC分类号： B05C5/02 ,  B05D1/00 ,  B05D1/26 ,  B05D3/04 ,  G03F1/16 ,  H01L21/00 ,  B05D3/12

CPC分类号： H01L21/6715 ,  B05C5/0208 ,  B05C5/0254 ,  B05D1/005 ,  B05D1/265 ,  B05D3/0486

摘要： A method of and an apparatus for coating a substrate with a polymer solution to produce a film of uniform thickness, includes mounting the substrate inside an enclosed housing and passing a control gas, which may be a solvent vapor-bearing gas into the housing through an inlet. The polymer solution is deposited onto the surface of the substrate in the housing and the substrate is then spun. The control gas and any solvent vapor and particulate contaminants suspended in the control gas are exhausted from the housing through an outlet and the solvent vapor concentration is controlled by controlling the temperature of the housing and the solvent from which the solvent vapor-bearing gas is produced. Instead the concentration can be controlled by mixing gases having different solvent concentrations. The humidity of the gas may also be controlled.

摘要翻译： 一种用聚合物溶液涂覆基材以产生均匀厚度的膜的方法和装置，包括将基板安装在封闭的壳体内，并将控制气体（其可以是溶剂蒸气承载气体）通过一个 进口。 聚合物溶液沉积在壳体中的基底表面上，然后旋转基底。 控制气体和悬浮在控制气体中的任何溶剂蒸汽和颗粒污染物通过出口从壳体排出，并且通过控制壳体的温度和产生溶剂蒸气的气体的溶剂来控制溶剂蒸汽浓度 。 而是可以通过混合具有不同溶剂浓度的气体来控制浓度。 也可以控制气体的湿度。

公开(公告)号：US07018943B2

公开(公告)日：2006-03-28

申请号：US09895786

申请日：2001-06-30

申请人： Gurer Emir ,  Tom Zhong ,  John Lewellen ,  Edward C. Lee ,  Robert P. Mandal ,  James C. Grambow ,  Ted C. Bettes ,  Donald R. Sauer ,  Edmond R. Ward

发明人： Gurer Emir ,  Tom Zhong ,  John Lewellen ,  Edward C. Lee ,  Robert P. Mandal ,  James C. Grambow ,  Ted C. Bettes ,  Donald R. Sauer ,  Edmond R. Ward

IPC分类号： H01L21/31

CPC分类号： H01L21/6715 ,  B05C5/0208 ,  B05C5/0245 ,  B05C5/0254 ,  B05D1/005 ,  B05D1/265 ,  B05D3/0486 ,  G03F7/162

摘要： A method of and an apparatus for coating a substrate with a polymer solution to produce a film of uniform thickness, includes mounting the substrate inside an enclosed housing and passing a control gas, which may be a solvent vapor-bearing gas into the housing through an inlet. The polymer solution is deposited onto the surface of the substrate in the housing and the substrate is then spun. The control gas and any solvent vapor and particulate contaminants suspended in the control gas are exhausted from the housing through an outlet and the solvent vapor concentration is controlled by controlling the temperature of the housing and the solvent from which the solvent vapor-bearing gas is produced. Instead the concentration can be controlled by mixing gases having different solvent concentrations. The humidity of the gas may also be controlled.

公开(公告)号：US5670210A

公开(公告)日：1997-09-23

申请号：US566227

申请日：1995-12-01

申请人： Robert P. Mandal ,  James C. Grambow ,  Ted C. Bettes ,  Donald R. Sauer ,  Emir Gurer ,  Edmond R. Ward

发明人： Robert P. Mandal ,  James C. Grambow ,  Ted C. Bettes ,  Donald R. Sauer ,  Emir Gurer ,  Edmond R. Ward

IPC分类号： G03F7/16 ,  B01J19/00 ,  B05C5/00 ,  B05C11/06 ,  B05D1/00 ,  B05D3/04 ,  G03F1/16 ,  H01L21/00 ,  H01L21/027 ,  B05D3/12

CPC分类号： H01L21/6715 ,  B05D1/005 ,  B05D3/0486

摘要： A method of and an apparatus for coating a substrate with a polymer solution to produce a film of uniform thickness, includes mounting the substrate inside an enclosed housing and passing a control gas, which may be a solvent vapor-bearing gas into the housing through an inlet. The polymer solution is deposited onto the surface of the substrate in the housing and the substrate is then spun. The control gas and any solvent vapour and particulate contaminants suspended in the control gas are exhausted from the housing through an outlet and the solvent vapor concentration is controlled by controlling the temperature of the housing and the solvent from which the solvent vapor-bearing gas is produced. Instead the concentration can be controlled by mixing gases having different solvent concentrations. The humidity of the gas may also be controlled.

摘要翻译： 一种用聚合物溶液涂覆基材以产生均匀厚度的膜的方法和装置，包括将基板安装在封闭的壳体内，并将控制气体（其可以是溶剂蒸气承载气体）通过一个 进口。 聚合物溶液沉积在壳体中的基底表面上，然后旋转基底。 控制气体和悬浮在控制气体中的任何溶剂蒸汽和颗粒污染物通过出口从壳体排出，并且通过控制壳体的温度和产生溶剂蒸气的气体的溶剂来控制溶剂蒸汽浓度 。 而是可以通过混合具有不同溶剂浓度的气体来控制浓度。 也可以控制气体的湿度。

公开(公告)号：US06238735B1

公开(公告)日：2001-05-29

申请号：US09391964

申请日：1999-09-08

申请人： Robert P. Mandal ,  James C. Grambow ,  Ted C. Dettes ,  Donald R. Sauer ,  Emir Gurer ,  Edmond R. Ward

发明人： Robert P. Mandal ,  James C. Grambow ,  Ted C. Dettes ,  Donald R. Sauer ,  Emir Gurer ,  Edmond R. Ward

IPC分类号： B05D312

CPC分类号： H01L21/6715 ,  B05D1/005 ,  B05D3/0486

摘要： A method of and an apparatus for coating a substrate with a polymer solution to produce a film of uniform thickness, includes mounting the substrate inside an enclosed housing and passing a control gas, which may be a solvent vapor-bearing gas into the housing through an inlet. The polymer solution is deposited onto the surface of the substrate in the housing and the substrate is then spun. The control gas and any solvent vapor and particulate contaminants suspended in the control gas are exhausted from the housing through an outlet and the solvent vapor concentration is controlled by controlling the temperature of the housing and the solvent from which the solvent vapor-bearing gas is produced. Instead the concentration can be controlled by mixing gases having different solvent concentrations. The humidity of the gas may also be controlled.

摘要翻译： 一种用聚合物溶液涂覆基材以产生均匀厚度的膜的方法和装置，包括将基板安装在封闭的壳体内，并将控制气体（其可以是溶剂蒸气承载气体）通过一个 进口。 聚合物溶液沉积在壳体中的基底表面上，然后旋转基底。 控制气体和悬浮在控制气体中的任何溶剂蒸汽和颗粒污染物通过出口从壳体排出，并且通过控制壳体的温度和产生溶剂蒸气的气体的溶剂来控制溶剂蒸汽浓度 。 而是可以通过混合具有不同溶剂浓度的气体来控制浓度。 也可以控制气体的湿度。

公开(公告)号：US5954878A

公开(公告)日：1999-09-21

申请号：US876273

申请日：1997-06-16

申请人： Robert P. Mandal ,  James C. Grambow ,  Ted C. Bettes ,  Donald R. Sauer ,  Emir Guegrer ,  Edmond R. Ward

发明人： Robert P. Mandal ,  James C. Grambow ,  Ted C. Bettes ,  Donald R. Sauer ,  Emir Guegrer ,  Edmond R. Ward

IPC分类号： G03F7/16 ,  B01J19/00 ,  B05C5/00 ,  B05C11/06 ,  B05D1/00 ,  B05D3/04 ,  G03F1/16 ,  H01L21/00 ,  H01L21/027 ,  B05B13/02

CPC分类号： H01L21/6715 ,  B05D1/005 ,  B05D3/0486

摘要： A method of and an apparatus for coating a substrate with a polymer solution to produce a film of uniform thickness, includes mounting the substrate inside an enclosed housing and passing a control gas, which may be a solvent vapor-bearing gas into the housing through an inlet. The polymer solution is deposited onto the surface of the substrate in the housing and the substrate is then spun. The control gas and any solvent vapour and particulate contaminants suspended in the control gas are exhausted from the housing through an outlet and the solvent vapor concentration is controlled by controlling the temperature of the housing and the solvent from which the solvent vapor-bearing gas is produced. Instead the concentration can be controlled by mixing gases having different solvent concentrations. The humidity of the gas may also be controlled.

摘要翻译： 一种用聚合物溶液涂覆基材以产生均匀厚度的膜的方法和装置，包括将基板安装在封闭的壳体内，并将控制气体（其可以是溶剂蒸气承载气体）通过一个 进口。 聚合物溶液沉积在壳体中的基底表面上，然后旋转基底。 控制气体和悬浮在控制气体中的任何溶剂蒸汽和颗粒污染物通过出口从壳体排出，并且通过控制壳体的温度和产生溶剂蒸气的气体的溶剂来控制溶剂蒸汽浓度 。 而是可以通过混合具有不同溶剂浓度的气体来控制浓度。 也可以控制气体的湿度。

公开(公告)号：US6002245A

公开(公告)日：1999-12-14

申请号：US258463

申请日：1999-02-26

申请人： Donald R. Sauer

发明人： Donald R. Sauer

IPC分类号： G05F3/26 ,  G05F3/30 ,  G05F3/16

CPC分类号： G05F3/30 ,  G05F3/267

摘要： A dual regeneration bandgap voltage generator circuit includes both CMOS and bipolar regeneration bandgap voltage generator circuits. Each of the regeneration bandgap voltage generator circuits is formed by cross-coupling current mirror circuits of opposite conductivity types. Upon initial application of power, the CMOS circuit becomes active first due to its higher leakage current. The "on" current from the CMOS circuit is then used to initiate current conduction within the bipolar circuit. Once the bipolar circuit begins operating, it turns the CMOS circuit off.

摘要翻译： 双重再生带隙电压发生器电路包括CMOS和双极再生带隙电压发生器电路。 每个再生带隙电压发生器电路由具有相反导电类型的交叉耦合电流镜电路形成。 在初次施加电源时，CMOS电路由于其较高的漏电流而首先变为有效。 然后使用来自CMOS电路的“导通”电流来引发双极电路内的电流传导。 一旦双极电路开始工作，就关闭CMOS电路。

公开(公告)号：US5963085A

公开(公告)日：1999-10-05

申请号：US78983

申请日：1998-05-14

申请人： Donald R. Sauer

发明人： Donald R. Sauer

IPC分类号： H03F3/30 ,  H03F3/45 ,  H03F1/02

CPC分类号： H03F3/3081 ,  H03F3/45318 ,  H03F3/45901 ,  H03F2203/45304 ,  H03F2203/45636 ,  H03F2203/45652 ,  H03F2203/45711

摘要： An interface stage for interfacing between input and output stages of a rail to rail comparator. The interface stage combines and amplifies four input stage output currents from the input stage, including by common base feeding them to a symmetrical set of virtual grounds, to generate a differential output signal for driving the output stage. In preferred embodiments, the interface stage includes two sets of bipolar transistors, each set connected in a common base configuration, which amplify each input stage output current and assert the resulting amplified signals to a pair of symmetrical virtual ground circuits. Each virtual ground circuit comprises a bipolar transistor and is configured to combine two of the amplified signals to generate one component of the differential output signal. By employing the virtual ground circuits, the slew rate of the interface stage is principally determined by its input transconductance and the collector-to-base stray capacitance of the bipolar transistors of the virtual ground circuits. Thus, since the virtual ground circuits can be implemented with minimum geometry bipolar transistors having very low collector-to-base stray capacitance, the interface stage can be implemented to have very high slew rate. In other embodiments, the invention comprises a rail to rail comparator input stage (having an autozero switch) coupled with an interface stage including autozero circuitry. The autozero circuitry and the autozero switch can be controlled to execute an autozero operation in which DC noise due to offset in the output signal (of the combined input and interface stage) is rapidly attenuated by means of a negative feedback loop.

摘要翻译： 用于在轨到轨比较器的输入和输出级之间进行接口的接口级。 接口级组合并放大来自输入级的四个输入级输出电流，包括通过共同的基极馈送到对称的一组虚拟接地，以产生用于驱动输出级的差分输出信号。 在优选实施例中，接口级包括两组双极晶体管，每组双极晶体管以公共基极配置连接，放大每个输入级输出电流，并将所产生的放大信号断言成一对对称的虚拟接地电路。 每个虚拟接地电路包括双极晶体管，并且被配置为组合两个放大信号以产生差分输出信号的一个分量。 通过采用虚拟接地电路，接口级的转换速率主要由虚拟接地电路的双极晶体管的输入跨导和集电极到基极杂散电容决定。 因此，由于虚拟接地电路可以用具有非常低的集电极到基极杂散电容的最小几何形状的双极晶体管来实现，所以可以实现接口级以具有非常高的压摆率。 在其他实施例中，本发明包括与包括自动调零电路的接口级耦合的轨到轨比较器输入级（具有自动调零开关）。 可以控制自动调零电路和自动调零开关，以执行自动归零操作，其中由输出信号（组合输入和接口级）输出的直流噪声通过负反馈回路快速衰减。