发明授权
- 专利标题: Semiconductor constructions
- 专利标题(中): 半导体结构
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申请号: US10999769申请日: 2004-11-29
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公开(公告)号: US07030499B2公开(公告)日: 2006-04-18
- 发明人: Michael J. Hermes
- 申请人: Michael J. Hermes
- 申请人地址: US ID Boise
- 专利权人: Micron Technology, Inc.
- 当前专利权人: Micron Technology, Inc.
- 当前专利权人地址: US ID Boise
- 代理机构: Wells St. John P.S.
- 主分类号: H01L23/48
- IPC分类号: H01L23/48
摘要:
The invention includes methods of forming openings extending through electrically insulative layers to electrically conductive materials. In an exemplary aspect, a substrate is provided which supports a stack and an electrical node. The stack comprises an electrically insulative cap over an electrically conductive material. An electrically insulative layer is formed over the stack and over the electrical node. A first etch is utilized to etch through the electrically insulative layer to the electrical node and to the electrically insulative cap. The first etch etches partially into the electrically insulative cap but does not etch entirely through the electrically insulative cap. A second etch is utilized after the first etch to etch entirely through the electrically insulative cap to the electrically conductive material of the stack.
公开/授权文献
- US20050095853A1 Semiconductor constructions 公开/授权日:2005-05-05
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