发明授权
- 专利标题: Apparatus for imaging metrology
- 专利标题(中): 成像计量仪器
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申请号: US09533613申请日: 2000-03-22
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公开(公告)号: US07042580B1公开(公告)日: 2006-05-09
- 发明人: Fred E. Stanke , Clinton B. Carlisle , Hung Pham , Edric Tong , Douglas E. Ruth , James M. Cahill , Michael Weber , Elliot Burke
- 申请人: Fred E. Stanke , Clinton B. Carlisle , Hung Pham , Edric Tong , Douglas E. Ruth , James M. Cahill , Michael Weber , Elliot Burke
- 申请人地址: JP Tokyo
- 专利权人: Tokyo Electron Limited
- 当前专利权人: Tokyo Electron Limited
- 当前专利权人地址: JP Tokyo
- 代理机构: Stallman & Pollock LLP
- 主分类号: G01B11/24
- IPC分类号: G01B11/24
摘要:
This invention is an apparatus for imaging metrology, which in particular embodiments may be integrated with a processor station such that a metrology station is apart from but coupled to a process station. The metrology station is provided with a first imaging camera with a first field of view containing the measurement region. Alternate embodiments include a second imaging camera with a second field of view. Preferred embodiments comprise a broadband ultraviolet light source, although other embodiments may have a visible or near infrared light source of broad or narrow optical bandwidth. Embodiments including a broad bandwidth source typically include a spectrograph, or an imaging spectrograph. Particular embodiments may include curved, reflective optics or a measurement region wetted by a liquid. In a typical embodiment, the metrology station and the measurement region are configured to have 4 degrees of freedom of movement relative to each other.