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公开(公告)号：US07042580B1
公开(公告)日：2006-05-09
申请号：US09533613
申请日：2000-03-22
申请人： Fred E. Stanke , Clinton B. Carlisle , Hung Pham , Edric Tong , Douglas E. Ruth , James M. Cahill , Michael Weber , Elliot Burke
发明人： Fred E. Stanke , Clinton B. Carlisle , Hung Pham , Edric Tong , Douglas E. Ruth , James M. Cahill , Michael Weber , Elliot Burke
IPC分类号： G01B11/24
CPC分类号： G01B11/0625 , B24B37/042 , B24B49/12 , G01B11/30 , G01N21/55 , G01N21/8422 , G01N21/9501 , G01N2021/8825 , H01L21/67259
摘要： This invention is an apparatus for imaging metrology, which in particular embodiments may be integrated with a processor station such that a metrology station is apart from but coupled to a process station. The metrology station is provided with a first imaging camera with a first field of view containing the measurement region. Alternate embodiments include a second imaging camera with a second field of view. Preferred embodiments comprise a broadband ultraviolet light source, although other embodiments may have a visible or near infrared light source of broad or narrow optical bandwidth. Embodiments including a broad bandwidth source typically include a spectrograph, or an imaging spectrograph. Particular embodiments may include curved, reflective optics or a measurement region wetted by a liquid. In a typical embodiment, the metrology station and the measurement region are configured to have 4 degrees of freedom of movement relative to each other.
摘要翻译： 本发明是一种用于成像测量的装置，其在特定实施例中可以与处理器站集成，使得计量站离开处理站而不是耦合到处理站。 计量站设置有具有包含测量区域的第一视野的第一成像照相机。 替代实施例包括具有第二视野的第二成像相机。 优选实施例包括宽带紫外光源，但是其他实施例可以具有宽或窄光带宽的可见光或近红外光源。 包括宽带宽源的实施例通常包括光谱仪或成像光谱仪。 具体实施例可以包括弯曲的，反射光学的或由液体润湿的测量区域。 在典型的实施例中，计量站和测量区域被配置为具有相对于彼此的4个移动自由度。
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公开(公告)号：US07177019B2
公开(公告)日：2007-02-13
申请号：US11048552
申请日：2005-02-01
申请人： Fred E. Stanke , Douglas E. Ruth , James M. Cahill , Michael Weber , Clinton B. Carlisle , Hung Pham , Edric Tong , Elliot Burke
发明人： Fred E. Stanke , Douglas E. Ruth , James M. Cahill , Michael Weber , Clinton B. Carlisle , Hung Pham , Edric Tong , Elliot Burke
IPC分类号： G01B11/24
CPC分类号： H01L21/67 , B24B37/005 , B24B49/12 , G01B11/0625 , G01B11/30 , G01N21/211 , G01N21/9501 , H01L22/12
摘要： This invention is an apparatus for imaging metrology, which in particular embodiments may be integrated with a processor station such that a metrology station is apart from but coupled to a process station. The metrology station is provided with a first imaging camera with a first field of view containing the measurement region. Alternate embodiments include a second imaging camera with a second field of view. Preferred embodiments comprise a broadband ultraviolet light source, although other embodiments may have a visible or near infrared light source of broad or narrow optical bandwidth. Embodiments including a broad bandwidth source typically include a spectrograph, or an imaging spectrograph. Particular embodiments may include curved, reflective optics or a measurement region wetted by a liquid. In a typical embodiment, the metrology station and the measurement region are configured to have 4 degrees of freedom of movement relative to each other.
摘要翻译： 本发明是一种用于成像测量的装置，其在特定实施例中可以与处理器站集成，使得计量站离开处理站而不是耦合到处理站。 计量站设置有具有包含测量区域的第一视野的第一成像照相机。 替代实施例包括具有第二视野的第二成像相机。 优选实施例包括宽带紫外光源，但是其他实施例可以具有宽或窄光带宽的可见光或近红外光源。 包括宽带宽源的实施例通常包括光谱仪或成像光谱仪。 具体实施例可以包括弯曲的，反射光学的或由液体润湿的测量区域。 在典型的实施例中，计量站和测量区域被配置为具有相对于彼此的4个移动自由度。
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公开(公告)号：US06563586B1
公开(公告)日：2003-05-13
申请号：US09613176
申请日：2000-07-10
申请人： Fred E. Stanke , Clinton B. Carlisle , Hung Pham , Edric Tong , Douglas E. Ruth , James M. Cahill , Michael Weber , Elliot Burke
发明人： Fred E. Stanke , Clinton B. Carlisle , Hung Pham , Edric Tong , Douglas E. Ruth , James M. Cahill , Michael Weber , Elliot Burke
IPC分类号： G01N2188
CPC分类号： H01L21/67 , B24B49/12 , G01B11/0625 , G01B11/30 , G01N21/211 , H01L22/12
摘要： This invention is an apparatus for imaging metrology, which in particular embodiments may be integrated with a processor station such that a metrology station is apart from but coupled to a process station. The metrology station is provided with a first imaging camera with a first field of view containing the measurement region. Alternate embodiments include a second imaging camera with a second field of view. Preferred embodiments comprise a broadband ultraviolet light source, although other embodiments may have a visible or near infrared light source of broad or narrow optical bandwidth. Embodiments including a broad bandwidth source typically include a spectrograph, or an imaging spectrograph. Particular embodiments may include curved, reflective optics or a measurement region wetted by a liquid. In a typical embodiment, the metrology station and the measurement region are configured to have 4 degrees of freedom of movement relative to each other.
摘要翻译： 本发明是一种用于成像测量的装置，其在特定实施例中可以与处理器站集成，使得计量站离开处理站而不是耦合到处理站。 计量站设置有具有包含测量区域的第一视野的第一成像照相机。 替代实施例包括具有第二视野的第二成像相机。 优选实施例包括宽带紫外光源，但是其他实施例可以具有宽或窄光带宽的可见光或近红外光源。 包括宽带宽源的实施例通常包括光谱仪或成像光谱仪。 具体实施例可以包括弯曲的，反射光学的或由液体润湿的测量区域。 在典型的实施例中，计量站和测量区域被配置为具有相对于彼此的4个移动自由度。
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公开(公告)号：US06919958B2
公开(公告)日：2005-07-19
申请号：US10397917
申请日：2003-03-26
申请人： Fred E. Stanke , Clinton B. Carlisle , Hung Van Pham , Edric Tong , Douglas E. Ruth , James M. Cahill, Jr. , Michael Weber-Grabau , Elliot Burke , Adam E. Norton
发明人： Fred E. Stanke , Clinton B. Carlisle , Hung Van Pham , Edric Tong , Douglas E. Ruth , James M. Cahill, Jr. , Michael Weber-Grabau , Elliot Burke , Adam E. Norton
IPC分类号： B24B49/12 , G01B11/06 , G01B11/30 , G01N21/21 , G01N21/95 , H01L21/66 , H01L21/67 , G01N21/88
CPC分类号： H01L21/67 , B24B49/12 , G01B11/0625 , G01B11/30 , G01N21/211 , H01L22/12
摘要： This invention is an apparatus for imaging metrology, which in particular embodiments may be integrated with a processor station such that a metrology station is apart from but coupled to a process station. The metrology station is provided with a first imaging camera with a first field of view containing the measurement region. Alternate embodiments include a second imaging camera with a second field of view. Preferred embodiments comprise a broadband ultraviolet light source, although other embodiments may have a visible or near infrared light source of broad or narrow optical bandwidth. Embodiments including a broad bandwidth source typically include a spectrograph, or an imaging spectrograph. Particular embodiments may include curved, reflective optics or a measurement region wetted by a liquid. In a typical embodiment, the metrology station and the measurement region are configured to have 4 degrees of freedom of movement relative to each other.
摘要翻译： 本发明是一种用于成像测量的装置，其在特定实施例中可以与处理器站集成，使得计量站离开处理站而不是耦合到处理站。 计量站设置有具有包含测量区域的第一视野的第一成像照相机。 替代实施例包括具有第二视野的第二成像相机。 优选实施例包括宽带紫外光源，但是其他实施例可以具有宽或窄光带宽的可见光或近红外光源。 包括宽带宽源的实施例通常包括光谱仪或成像光谱仪。 具体实施例可以包括弯曲的，反射光学的或由液体润湿的测量区域。 在典型的实施例中，计量站和测量区域被配置为具有相对于彼此的4个移动自由度。
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公开(公告)号：US07986603B1
公开(公告)日：2011-07-26
申请号：US12286295
申请日：2008-09-29
IPC分类号： G11B7/00
摘要： A holographic data storage (HDS) system and method are provided. Generally, the system includes: a light source for generating a coherent light; beam-forming optics for forming the light into collimated object and reference beams; holographic storage medium; a spatial light modulator (SLM) located in a path of the object beam from the beam-forming optics to the storage medium, the SLM having a number of pixels for encoding data to be stored in the medium into the object beam. Preferably, the SLM can modulate both the amplitude and phase of light from every pixel on the SLM. More preferably, the SLM is also located in a path of the reference beam to the storage medium to modulate the phase of the light to store multiple holographic pages of data in the same physical volume of medium through phase multiplexing. Other embodiments are also described.
摘要翻译： 提供了全息数据存储（HDS）系统和方法。 通常，该系统包括：用于产生相干光的光源; 用于将光成型为准直物体和参考光束的光束形成光学器件; 全息存储介质; 位于物镜光束从光束形成光学器件到存储介质的路径中的空间光调制器（SLM），SLM具有多个像素，用于将待存储在介质中的数据编码到物体光束中。 优选地，SLM可以调制SLM上每个像素的光的幅度和相位。 更优选地，SLM还位于参考光束到存储介质的路径中，以调制光的相位，以通过相位多路复用在相同物理体积的介质中存储数据的多个全息页。 还描述了其它实施例。
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公开(公告)号：US07773070B2
公开(公告)日：2010-08-10
申请号：US11124858
申请日：2005-05-09
IPC分类号： G09G5/08
CPC分类号： G06F3/0317 , G06F3/0354
摘要： One embodiment relates to an optical displacement sensor for sensing movement of a data input device across a surface by determining displacement of optical features in a succession of frames. The sensor includes at least an illuminator, telecentric imaging optics on the object (scattering surface) side, and an array of photosensitive elements. The illuminator is configured to illuminate a portion of the surface. The telecentric imaging optics is configured to image the optical features emanating from the illuminated portion of the surface, and the array of photosensitive elements is configured to detect intensity data relating to the optical features imaged by the telecentric imaging optics. Other embodiments are also disclosed.
摘要翻译： 一个实施例涉及一种光学位移传感器，用于通过确定一连串框架中的光学特征的位移来感测跨越表面的数据输入设备的移动。 传感器至少包括照明器，物体（散射面）侧的远心成像光学元件和感光元件阵列。 照明器被配置为照亮表面的一部分。 远心成像光学器件被配置为对从表面的照射部分发出的光学特征成像，并且光敏元件阵列被配置为检测与由远心成像光学器件成像的光学特征有关的强度数据。 还公开了其他实施例。
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7.发明授权Optical navigation sensor with tracking and lift detection for optically transparent contact surfaces 有权光学导航传感器，具有光学透明接触面的跟踪和提升检测功能公开(公告)号：US07755604B2
公开(公告)日：2010-07-13
申请号：US11455921
申请日：2006-06-19
CPC分类号： G06F3/0317
摘要： In one embodiment, an optical navigation sensor for a computer mouse is designed to be operable on an optically transparent material. The optically transparent material may include a contact surface on which the mouse sits during normal operation. An optically rough tracking surface is provided below the contact surface. The mouse includes a light source that illuminates an area on the contact surface and an area on the tracking surface. The mouse may include a tracking sensor onto which the illuminated area on the tracking surface is imaged to detect mouse displacement. The mouse may also include a lift sensor that picks up specular light reflected from the illuminated area on the contact surface to generate lift information indicative of whether the mouse has been lifted off the contact surface. Tracking of the mouse displacement may be qualified with the lift information.
摘要翻译： 在一个实施例中，用于计算机鼠标的光学导航传感器被设计为可在光学透明材料上操作。 光学透明材料可以包括在正常操作期间鼠标所在的接触表面。 在接触表面下方设置光学粗糙的跟踪表面。 鼠标包括照亮接触表面上的区域和跟踪表面上的区域的光源。 鼠标可以包括跟踪传感器，跟踪表面上的照明区域在其上成像以检测鼠标位移。 鼠标还可以包括提升传感器，其拾取从接触表面上的照明区域反射的镜面光，以产生指示鼠标是否已被提升离开接触表面的提升信息。 鼠标位移的跟踪可以通过升降信息进行限定。
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公开(公告)号：US07737948B2
公开(公告)日：2010-06-15
申请号：US11313133
申请日：2005-12-20
IPC分类号： G09G5/08
CPC分类号： G06F3/0317
摘要： One embodiment relates to a laser positioning device for sensing relative movement between a data input device and a surface by determining displacement of image features in a succession of images of the surface. The device forms a single integrated package, which includes a planar substrate and a transparent encapsulant that also embodies a collimating lens. Both a coherent light source and a sensor array and associated circuitry are configured on the planar substrate. Another embodiment relates to a method of sensing relative movement between a data input device and a surface. Coherent light is emitted from a laser and collimated so as to form a collimated illumination beam with a predetermined diameter, D, and a substantially uniform phase front. A speckle pattern is generated by impingement of the collimated illumination beam on the surface and detected by a sensor array. Other embodiments are also disclosed.
摘要翻译： 一个实施例涉及一种激光定位装置，用于通过确定表面的一连串图像中的图像特征的位移来感测数据输入装置和表面之间的相对运动。 该装置形成单个集成封装，其包括平面基板和还包含准直透镜的透明密封剂。 相干光源和传感器阵列及相关联的电路均配置在平面基板上。 另一个实施例涉及一种检测数据输入装置与表面之间的相对运动的方法。 相干光从激光发射并准直，以形成具有预定直径D和基本均匀相位前沿的准直照明光束。 通过将准直照明光束照射在表面上并由传感器阵列检测而产生斑点图案。 还公开了其他实施例。
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9.发明授权Optical position sensing device including interlaced groups of photosensitive elements 有权光学位置检测装置包括感光元件的交错组公开(公告)号：US07268341B2
公开(公告)日：2007-09-11
申请号：US11123326
申请日：2005-05-04
IPC分类号： G09G5/08
CPC分类号： G01D5/34715 , G01B11/002 , G06F3/0317
摘要： One embodiment described relates to an optical displacement sensor for sensing movement of a data input device across a surface by detecting displacement of optical features in a succession of images of the surface. The sensor includes a detector having an array including a number (N) of sets of photosensitive elements, each set having a number (M) of photosensitive elements, where M is greater than two and not equal to four. Signals from each of the photosensitive elements in a set are electrically coupled or combined with corresponding photosensitive elements in other sets to produce a total of M independent group signals from M interlaced groups of photosensitive elements. Other embodiments are also described.
摘要翻译： 所描述的一个实施例涉及一种光学位移传感器，用于通过检测表面的一系列图像中的光学特征的位移来感测跨越表面的数据输入设备的移动。 传感器包括具有阵列的检测器，该阵列包括数个（N）组光敏元件，每组具有数量（M）的感光元件，其中M大于2并且不等于4。 来自一组中的每个感光元件的信号与其他组中的相应光敏元件电耦合或组合，以产生来自M个隔离光敏元件组的M个独立组信号。 还描述了其它实施例。
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公开(公告)号：US07088497B1
公开(公告)日：2006-08-08
申请号：US10731955
申请日：2003-12-10
CPC分类号： G02B5/1828
摘要： In one embodiment, an optical device includes a polarization diversity module configured to receive an optical input signal and output a first optical output signal and a second optical output signal having the same polarization state. This helps ensure light beams propagating in the optical device have the same polarization state, thereby mitigating the effects of polarization-dependent loss in the optical device. In one embodiment, the optical device comprises an optical dynamic gain equalizer with a light modulator.
摘要翻译： 在一个实施例中，光学装置包括偏振分集模块，其被配置为接收光输入信号并输出具有相同偏振状态的第一光输出信号和第二光输出信号。 这有助于确保在光学器件中传播的光束具有相同的偏振状态，从而减轻光学器件中偏振相关损耗的影响。 在一个实施例中，光学装置包括具有光调制器的光学动态增益均衡器。
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