发明授权
- 专利标题: Missing die detection
- 专利标题(中): 缺失检测
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申请号: US10618297申请日: 2003-07-11
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公开(公告)号: US07045803B2公开(公告)日: 2006-05-16
- 发明人: Fan Wang , Wing Hong Leung
- 申请人: Fan Wang , Wing Hong Leung
- 申请人地址: HK
- 专利权人: ASM Assembly Automation Ltd.
- 当前专利权人: ASM Assembly Automation Ltd.
- 当前专利权人地址: HK
- 代理机构: Ostrolenk, Faber, Gerb & Soffen, LLP
- 主分类号: G01N21/86
- IPC分类号: G01N21/86 ; G01V8/00
摘要:
An indication of whether or not a target object is present at a site of a collet assembly is derived by monitoring light reflected from the site. The use of reflected light enables the presence of objects to be detected, especially transparent objects. In a preferred arrangement for determining if a sapphire die is present in a die-handling collet assembly, light from a source is collimated or focused into a narrow beam and directed through a beam splitter at the target site of the collet assembly. Light reflected from the surface of the die is further reflected by the beam splitter toward a photo-sensor. The reflected light is measured when the collet passes over a dark background while on the way to deliver a die at a bonding position and again while returning after attempting to place the die at the bonding position. A determination of a die present in the former and absent in the latter is indicative of a well-placed die at the bonding position.
公开/授权文献
- US20050006606A1 Missing die detection 公开/授权日:2005-01-13
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