发明授权
US07045840B2 Nonvolatile semiconductor memory device comprising a variable resistive element containing a perovskite-type crystal structure 有权
包括含有钙钛矿型晶体结构的可变电阻元件的非易失性半导体存储器件

Nonvolatile semiconductor memory device comprising a variable resistive element containing a perovskite-type crystal structure
摘要:
In a nonvolatile semiconductor memory device including a variable resistive element formed by sequentially stacking a lower electrode, a variable resistor with a perovskite-type crystal structure, and an upper electrode, at least one of the lower electrode and the upper electrode is a particulate electrode configured to include a particulate conductor aggregate so that the contact area with the variable resistor at an interface is effectively reduced to realize high initial resistance of the variable resistive element. Further, a film of the variable resistor is preferably formed so as to be in a highly crystalline state.
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