发明授权
- 专利标题: Semiconductor memory device and its production process
- 专利标题(中): 半导体存储器件及其生产工艺
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申请号: US10727266申请日: 2003-12-04
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公开(公告)号: US07061038B2公开(公告)日: 2006-06-13
- 发明人: Tetsuo Endoh , Fujio Masuoka , Takuji Tanigami , Takashi Yokoyama , Shinji Horii
- 申请人: Tetsuo Endoh , Fujio Masuoka , Takuji Tanigami , Takashi Yokoyama , Shinji Horii
- 申请人地址: JP Osaka JP Miyagi
- 专利权人: Sharp Kabushiki Kaisha,Fujio Masuoka
- 当前专利权人: Sharp Kabushiki Kaisha,Fujio Masuoka
- 当前专利权人地址: JP Osaka JP Miyagi
- 代理机构: Nixon & Vanderhye P.C.
- 优先权: JP2002-354403 20021205
- 主分类号: H01L29/76
- IPC分类号: H01L29/76
摘要:
The present invention provides a semiconductor memory device comprising: a first conductivity type semiconductor substrate; and a plurality of memory cells constituted of an island-like semiconductor layer which is formed on the semiconductor substrate, and a charge storage layer and a control gate which are formed entirely or partially around a sidewall of the island-like semiconductor layer, wherein the plurality of memory cells are disposed in series, the island-like semiconductor layer which constitutes the memory cells has cross-sectional areas varying in stages in a horizontal direction of the semiconductor substrate, and an insulating film capable of passing charges is provided at least in a part of a plane of the island-like semiconductor layer horizontal to the semiconductor substrate.
公开/授权文献
- US20050101087A1 Semiconductor memory device and its production process 公开/授权日:2005-05-12
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