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US07077310B2 Dual ID verification system and switching method therefor 失效
双ID验证系统及其切换方法

Dual ID verification system and switching method therefor
Abstract:
A method for switch dual Id verification systems for installing another carrier ID system on an equipment installation complying with SEMI E87. A first identification access system has internally installed on an equipment installation on which a second identification access system is then installed. Both systems are switched using a control flow and a wafer carrier ID is obtained by the chosen verification system.
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