Invention Grant
US07079718B2 Optical probe and method of testing employing an interrogation beam or optical pickup 有权
光探头和使用询问光束或光学拾取器的测试方法

Optical probe and method of testing employing an interrogation beam or optical pickup
Abstract:
An optical probe and a method for testing an optical chip or device, such as an photonic integrated circuit (PIC), to provide for testing of such devices or circuits while they are still in their in-wafer form and is accomplished by using a an optical probe for interrogation of the circuit where an access is provided in the wafer to one or more of such in-wafer devices or circuits. As one example, the interrogation may be an interrogation beam provided at the access input to the in-wafer device or circuit. As another example, the interrogation may be an optical pickup from the access input to the in-wafer device or circuit.
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