发明授权
- 专利标题： Facet mirror having a number of mirror facets
- 专利标题（中）： 面镜具有多个镜面
-
申请号： US10841846申请日： 2004-05-07
-
公开(公告)号： US07090362B2公开(公告)日： 2006-08-15
- 发明人: Hubert Holderer , Andreas Heisler , Wolfgang Singer , Markus Weiss , Andreas Seifert , Frank Melzer , Heinz Mann
- 申请人： Hubert Holderer , Andreas Heisler , Wolfgang Singer , Markus Weiss , Andreas Seifert , Frank Melzer , Heinz Mann
- 申请人地址： DE
- 专利权人： Carl Zeiss SMT AG
- 当前专利权人： Carl Zeiss SMT AG
- 当前专利权人地址： DE
- 代理机构： GrayRobinson, PA
- 优先权： DE10155261 20011109; DE10160932 20011212
- 主分类号： G02B26/08
- IPC分类号： G02B26/08 ; G02B7/18
摘要：
In a facet mirror with a number of mirror facets, wherein the mirror facets are provided with reflecting surfaces, the mirror facets are mounted jointly in a basic body via bearing devices. The mirror facets comprise mirror bodies contacting at the periphery with the bearing devices via a surface, line or point contact. The preferred field of use of the facet mirrors is a projection objective of a projection exposure machine in microlithography for fabricating semiconductor elements.
公开/授权文献
- US20050030656A1 Facet mirror having a number of mirror facets 公开/授权日：2005-02-10