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公开(公告)号：US07090362B2
公开(公告)日：2006-08-15
申请号：US10841846
申请日：2004-05-07
申请人： Hubert Holderer , Andreas Heisler , Wolfgang Singer , Markus Weiss , Andreas Seifert , Frank Melzer , Heinz Mann
发明人： Hubert Holderer , Andreas Heisler , Wolfgang Singer , Markus Weiss , Andreas Seifert , Frank Melzer , Heinz Mann
CPC分类号： G03F7/70258 , G02B5/09 , G02B7/1821 , G02B7/1824 , G02B26/0816 , G03F7/70075 , G03F7/70141 , G03F7/702 , G03F7/70275
摘要： In a facet mirror with a number of mirror facets, wherein the mirror facets are provided with reflecting surfaces, the mirror facets are mounted jointly in a basic body via bearing devices. The mirror facets comprise mirror bodies contacting at the periphery with the bearing devices via a surface, line or point contact. The preferred field of use of the facet mirrors is a projection objective of a projection exposure machine in microlithography for fabricating semiconductor elements.
摘要翻译： 在具有多个镜面的小平面镜中，其中镜面设置有反射面，镜面通过轴承装置联合地安装在基体内。 镜面包括通过表面，线或点接触在外周与轴承装置接触的镜体。 小平面镜的优选使用领域是用于制造半导体元件的微光刻中的投影曝光机的投影物镜。
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公开(公告)号：US07354168B2
公开(公告)日：2008-04-08
申请号：US10848210
申请日：2004-05-18
申请人： Hubert Holderer , Andreas Heisler , Wolfgang Singer , Markus Weiss , Andreas Seifert , Frank Melzer , Heinz Mann , Jurgen Faltus , Berndt Warm , Stefan Dornheim
发明人： Hubert Holderer , Andreas Heisler , Wolfgang Singer , Markus Weiss , Andreas Seifert , Frank Melzer , Heinz Mann , Jurgen Faltus , Berndt Warm , Stefan Dornheim
CPC分类号： G03F7/70075 , G02B5/09 , G02B7/1821 , G02B7/1824 , G02B7/198 , G02B26/0833 , G03F7/70108 , G03F7/70141 , G03F7/70175 , G03F7/702
摘要： A facet mirror (10) is provided with a number of mirror facets (11), in which the mirror facets (11) respectively have a spherical or conical facet body (17) with a reflecting surface (12). The side of the facet body (17) averted from the reflecting surface (12) is mounted in a bearing device (15).
摘要翻译： 小面反射镜（10）设置有多个镜面（11），其中镜面（11）分别具有带有反射表面（12）的球形或圆锥形小面体（17）。 从反射面（12）避开的小面体（17）的一侧安装在轴承装置（15）中。
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公开(公告)号：US20050030653A1
公开(公告)日：2005-02-10
申请号：US10848210
申请日：2004-05-18
申请人： Hubert Holderer , Andreas Heisler , Wolfgang Singer , Markus Weiss , Andreas Seifert , Frank Melzer , Heinz Mann , Jurgen Faltus , Berndt Warm , Stefan Dornheim
发明人： Hubert Holderer , Andreas Heisler , Wolfgang Singer , Markus Weiss , Andreas Seifert , Frank Melzer , Heinz Mann , Jurgen Faltus , Berndt Warm , Stefan Dornheim
CPC分类号： G03F7/70075 , G02B5/09 , G02B7/1821 , G02B7/1824 , G02B7/198 , G02B26/0833 , G03F7/70108 , G03F7/70141 , G03F7/70175 , G03F7/702
摘要： Facet mirror having a number of mirror facets A facet mirror (10) is provided with a number of mirror facets (11), in which the mirror facets (11) respectively have a spherical or conical facet body (17) with a reflecting surface (12). The side of the facet body (17) averted from the reflecting surface (12) is mounted in a bearing device (15).
摘要翻译： 具有多个镜面的面镜具有多个镜面（11），其中镜面（11）分别具有球面或圆锥形小面体（17），其具有反射表面（11） 12）。 从反射面（12）避开的小面体（17）的一侧安装在轴承装置（15）中。
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公开(公告)号：US20050030656A1
公开(公告)日：2005-02-10
申请号：US10841846
申请日：2004-05-07
申请人： Hubert Holderer , Andres Heisler , Wolfgang Singer , Markus Weiss , Andreas Seifert , Frank Melzer , Heinz Mann
发明人： Hubert Holderer , Andres Heisler , Wolfgang Singer , Markus Weiss , Andreas Seifert , Frank Melzer , Heinz Mann
CPC分类号： G03F7/70258 , G02B5/09 , G02B7/1821 , G02B7/1824 , G02B26/0816 , G03F7/70075 , G03F7/70141 , G03F7/702 , G03F7/70275
摘要： In a facet mirror with a number of mirror facets, wherein the mirror facets are provided with reflecting surfaces, the mirror facets are mounted jointly in a basic body via bearing devices. The mirror facets comprise mirror bodies contacting at the periphery with the bearing devices via a surface, line or point contact. The preferred field of use of the facet mirrors is a projection objective of a projection exposure machine in microlithography for fabricating semiconductor elements.
摘要翻译： 在具有多个镜面的小平面镜中，其中镜面设置有反射面，镜面通过轴承装置联合地安装在基体内。 镜面包括通过表面，线或点接触在外周与轴承装置接触的镜体。 小平面镜的优选使用领域是用于制造半导体元件的微光刻中的投影曝光机的投影物镜。
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公开(公告)号：US20070019310A1
公开(公告)日：2007-01-25
申请号：US10563701
申请日：2004-07-08
申请人： Andreas Seifert , Frank Melzer , Andreas Heisler , Heinz Mann , Gerhard Romeyn
发明人： Andreas Seifert , Frank Melzer , Andreas Heisler , Heinz Mann , Gerhard Romeyn
IPC分类号： G02B5/08
CPC分类号： G03F7/70075 , G02B5/08 , G02B5/09 , G03F7/70141 , G03F7/702 , G03F7/70825 , G21K2201/06
摘要： In a method for producing mirror facets (1) for facet mirrors in illuminating devices or projection exposure machines in microlithography by using radiation in the extreme ultraviolet range, individual tilting angles are recessed into an optical surface (2) of the mirror facet (1), preferably a surface with tilting angles relative to a reference surface of the mirror facet (1) is machined into or on said optical surface.
摘要翻译： 在通过使用在极紫外线范围内的辐射的微照相中的用于在照明装置或投影曝光机中制造用于刻面镜的镜面（1）的方法中，各个倾斜角度凹入到镜面（1）的光学表面（2）中， 优选地，相对于镜面（1）的参考表面具有倾斜角度的表面被加工到所述光学表面中或所述光学表面上。
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公开(公告)号：US06836530B2
公开(公告)日：2004-12-28
申请号：US10163262
申请日：2002-06-05
申请人： Wolfgang Singer , Markus Weiss , Bernd Kleemann , Karlfried Osterried , Johannes Wangler , Frank Melzer , Andreas Heisler , Vadim Yevgenyevich Banine
发明人： Wolfgang Singer , Markus Weiss , Bernd Kleemann , Karlfried Osterried , Johannes Wangler , Frank Melzer , Andreas Heisler , Vadim Yevgenyevich Banine
IPC分类号： G21K500
CPC分类号： G03F7/70158 , G03F7/702 , G21K1/06
摘要： There is provided an illumination system for wavelengths of ≦100 nm, having an object plane and a field plane. The illumination system includes a grating element having a plurality of gratings, and a diaphragm. The diaphragm is arranged after the grating element in a beam path from the object plane to the field plane.
摘要翻译： 提供了具有物体平面和场平面的<= 100nm波长的照明系统。 照明系统包括具有多个光栅的光栅元件和隔膜。 隔膜设置在从物体平面到场平面的光束路径中的光栅元件之后。
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公开(公告)号：US20080297755A1
公开(公告)日：2008-12-04
申请号：US12218400
申请日：2008-07-15
申请人： Martin Antoni , Frank Melzer , Andreas Seifert , Wolfgang Singer
发明人： Martin Antoni , Frank Melzer , Andreas Seifert , Wolfgang Singer
IPC分类号： G03B27/54
CPC分类号： G03F7/70058 , G02B5/10 , G02B17/02 , G02B27/0025 , G02B27/30
摘要： A focusing-device for the radiation from a light source (2) is provided with a collector mirror (1, 1′) which is arranged in a mount (24) and collects the light, in virtual or real terms, from the light source (2) at the second focus (200). The collector mirror (1, 1′) is displaceably connected to the mount (24) via a bearing in such a way that its optical properties remain at least approximately the same even in the event of temperature changes.
摘要翻译： 用于来自光源（2）的辐射的聚焦装置设置有集中器反射镜（1,1'），其被布置在安装件（24）中，并以虚拟或实际的方式从光源收集光 （2）在第二焦点（200）。 收集镜（1,1'）经由轴承可移动地连接到支座（24），使得即使在温度变化的情况下，它的光学特性保持至少近似相同。
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公开(公告)号：US06655808B2
公开(公告)日：2003-12-02
申请号：US09950186
申请日：2001-09-10
申请人： Martin Antoni , Frank Melzer , Andreas Seifert , Wolfgang Singer
发明人： Martin Antoni , Frank Melzer , Andreas Seifert , Wolfgang Singer
IPC分类号： G02B508
CPC分类号： G03F7/70058 , G02B5/10 , G02B17/02 , G02B27/0025 , G02B27/30
摘要： A focusing-device for the radiation from a light source, in particular a laser plasma source, has a collector mirror which collects the light from the light source at a second focus in virtual or real terms, in particular for micro-lithography using EUV radiation, and a routing unit and downstream beam formation in an illuminating system. The collector mirror can be displaced in the z-direction (optical axis) and is designed and/or mounted in such a way that the position of the second focus remains unchanged in the event of temperature changes.
摘要翻译： 用于来自光源，特别是激光等离子体源的辐射的聚焦装置具有收集器反射镜，其以虚拟或实际方式在第二焦点处收集来自光源的光，特别是对于使用EUV辐射的微光刻 ，以及照明系统中的路由单元和下游波束形成。 集光镜可以在z方向（光轴）上移位，并且被设计和/或安装成使得在温度变化的情况下第二焦点的位置保持不变。
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公开(公告)号：US07871171B2
公开(公告)日：2011-01-18
申请号：US12218400
申请日：2008-07-15
申请人： Martin Antoni , Frank Melzer , Andreas Seifert , Wolfgang Singer
发明人： Martin Antoni , Frank Melzer , Andreas Seifert , Wolfgang Singer
IPC分类号： G02B5/08
CPC分类号： G03F7/70058 , G02B5/10 , G02B17/02 , G02B27/0025 , G02B27/30
摘要： A focusing-device for the radiation from a light source (2) is provided with a collector mirror (1, 1′) which is arranged in a mount (24) and collects the light, in virtual or real terms, from the light source (2) at the second focus (200). The collector mirror (1, 1′) is displaceably connected to the mount (24) via a bearing in such a way that its optical properties remain at least approximately the same even in the event of temperature changes.
摘要翻译： 用于来自光源（2）的辐射的聚焦装置设置有集中器反射镜（1,1'），其被布置在安装件（24）中，并以虚拟或实际的方式从光源收集光 （2）在第二焦点（200）。 收集镜（1,1'）经由轴承可移动地连接到支座（24），使得即使在温度变化的情况下，它的光学特性保持至少近似相同。
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公开(公告)号：US07410265B2
公开(公告)日：2008-08-12
申请号：US10675471
申请日：2003-09-30
申请人： Martin Antoni , Frank Melzer , Andreas Seifert , Wolfgang Singer , Wilhelm Egle , Bernhard Gellrich , Bernhard Geuppert
发明人： Martin Antoni , Frank Melzer , Andreas Seifert , Wolfgang Singer , Wilhelm Egle , Bernhard Gellrich , Bernhard Geuppert
IPC分类号： G02B5/08
CPC分类号： G03F7/70825 , B82Y10/00 , G02B5/10 , G02B17/02 , G02B27/0025 , G02B27/30 , G03F7/70058 , G03F7/70166 , G03F7/70175
摘要： A focusing-device for the radiation from a light source (2) is provided with a collector mirror (1, 1′) which is arranged in a mount (24) and collects the light, in virtual or real terms, from the light source (2) at the second focus (200). The collector mirror (1, 1′) is displaceably connected to the mount (24) via a bearing in such a way that its optical properties remain at least approximately the same even in the event of temperature changes.
摘要翻译： 用于来自光源（2）的辐射的聚焦装置设置有集中器反射镜（1,1'），其被布置在安装件（24）中，并以虚拟或实际的方式从光源收集光 （2）在第二焦点（200）。 收集镜（1,1'）经由轴承可移动地连接到支座（24），使得即使在温度变化的情况下，它的光学特性保持至少近似相同。
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