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    HOLDING ARRANGEMENT FOR AN OPTICAL ELEMENT
    5.
    发明申请
    HOLDING ARRANGEMENT FOR AN OPTICAL ELEMENT 失效
    光学元件的安装

    公开(公告)号：US20120140341A1

    公开(公告)日：2012-06-07

    申请号：US13359368

    申请日：2012-01-26

    申请人： Ulrich Weber ,  Hubert Holderer

    发明人： Ulrich Weber ,  Hubert Holderer

    IPC分类号： G02B7/02

    CPC分类号： G03F7/70825 ,  B23K26/02 ,  B23K26/035 ,  G02B7/003 ,  G02B7/028

    摘要： A holding arrangement for an optical element includes a basic structure surrounding an optical element and a mounting device by which the optical element can be supported on the basic structure with two degrees of freedom for a rotational movement about an optical axis and a translational movement along a first axis which extends perpendicularly to the optical axis and intersects the optical axis in a center. The mounting device includes four joint locations arranged point-symmetrically with respect to the center and at least one parallel rocker which is displaceable parallel to the first axis. A manipulator unit includes a holding arrangement.

    摘要翻译： 用于光学元件的保持装置包括围绕光学元件的基本结构和安装装置，通过该安装装置，光学元件可以以两个自由度支撑在基本结构上，用于围绕光轴的旋转运动和沿着光轴的平移运动 第一轴线垂直于光轴延伸并与中心的光轴相交。 安装装置包括相对于中心点对称布置的四个关节位置和平行于第一轴线移动的至少一个平行摇杆。 操纵器单元包括保持装置。

    OPTICAL SYSTEM HAVING AN OPTICAL ARRANGEMENT
    8.
    发明申请
    OPTICAL SYSTEM HAVING AN OPTICAL ARRANGEMENT 有权
    具有光学布置的光学系统

    公开(公告)号：US20110025992A1

    公开(公告)日：2011-02-03

    申请号：US12838149

    申请日：2010-07-16

    申请人： Hubert Holderer ,  Johannes Lippert ,  Armin Schoeppach

    发明人： Hubert Holderer ,  Johannes Lippert ,  Armin Schoeppach

    IPC分类号： G03B27/54 ,  G03B27/52

    CPC分类号： G02B7/008 ,  G02B7/028 ,  G02B27/0927 ,  G03F7/70825 ,  G03F7/70891

    摘要： An optical system, such as an illumination system, includes an optical arrangement having at least one optical element and at least one heat dissipation element configured to at least partially dissipate thermal energy generated in the optical element(s) to the outside environment of the optical system. The heat dissipation element(s) is(are) arranged without direct contact with the optical element(s).

    摘要翻译： 诸如照明系统的光学系统包括具有至少一个光学元件和至少一个散热元件的光学装置，该至少一个散热元件被配置为至少部分地将在光学元件中产生的热能消耗到光学元件的外部环境 系统。 散热元件被布置成不与光学元件直接接触。

    Process for connecting an optical element of a microlithographic projection exposure apparatus to a mount, and assembly
    10.
    发明授权
    Process for connecting an optical element of a microlithographic projection exposure apparatus to a mount, and assembly 有权
    用于将微光刻投影曝光装置的光学元件连接到安装件和组件的方法

    公开(公告)号：US07551375B2

    公开(公告)日：2009-06-23

    申请号：US11386236

    申请日：2006-03-21

    申请人： Johannes Rau ,  Josef Distl ,  Armin Schoeppach ,  Hubert Holderer

    发明人： Johannes Rau ,  Josef Distl ,  Armin Schoeppach ,  Hubert Holderer

    IPC分类号： G02B7/02

    CPC分类号： G03F7/70825 ,  C03C27/046 ,  C04B37/04 ,  C04B2237/12 ,  Y10T29/49144

    摘要： The invention relates to processes for connecting an optical element of a microlithographic projection exposure apparatus to a mount, and also relates to an assembly. A process includes the following steps: forming a substance mixture at a processing temperature from at least a first component, which is solid at the processing temperature, and a second component, which is liquid at the processing temperature, the first component being dispersed in the second component, introducing the substance mixture in the unset state between the optical element and the mount, and setting the substance mixture so as to form a diffusion alloy from the first and second components.

    摘要翻译： 本发明涉及用于将微光刻投影曝光装置的光学元件连接到安装件的方法，并且还涉及一种组件。 一种方法包括以下步骤：在加工温度下从处于加工温度下为固体的至少第一组分和在处理温度下为液体的第二组分形成物质混合物，第一组分分散在 将所述物质混合物引入所述光学元件和所述安装件之间的未设定状态，并且将所述物质混合物设定为从所述第一和第二成分形成扩散合金。